APA (7th ed.) Citation

Lebedev, A. V., & Gagarina, L. G. (2021, January 26). Development of Method and Means of Coordinate -Parametric Control in ASC for Production of Microelectronics Products. IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference, 2700-2702. https://doi.org/10.1109/ElConRus51938.2021.9396524

Chicago Style (17th ed.) Citation

Lebedev, Alexander V., and Larisa G. Gagarina. "Development of Method and Means of Coordinate -Parametric Control in ASC for Production of Microelectronics Products." IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference 26 Jan. 2021: 2700-2702. https://doi.org/10.1109/ElConRus51938.2021.9396524.

MLA (9th ed.) Citation

Lebedev, Alexander V., and Larisa G. Gagarina. "Development of Method and Means of Coordinate -Parametric Control in ASC for Production of Microelectronics Products." IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference, 26 Jan. 2021, pp. 2700-2702, https://doi.org/10.1109/ElConRus51938.2021.9396524.