Development of Method and Means of Coordinate -Parametric Control in ASC for Production of Microelectronics Products

The article describes the method of coordinate - parametric control in ASC of microelectronics products production. An attempt was made to substantiate the phenomenon of coordinate uncontrollability according to R. Kalman during the transition from ACS objects to ERP objects. Method operation algori...

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Bibliographic Details
Published inIEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference pp. 2700 - 2702
Main Authors Lebedev, Alexander V., Gagarina, Larisa G.
Format Conference Proceeding
LanguageEnglish
Published IEEE 26.01.2021
Subjects
Conferences
coordiant parametricheski-structural management
imitating modeling
Kalman filters
Microelectronics
Production
R. Kalman criteria
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ISSN2376-6565
DOI10.1109/ElConRus51938.2021.9396524

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Summary:The article describes the method of coordinate - parametric control in ASC of microelectronics products production. An attempt was made to substantiate the phenomenon of coordinate uncontrollability according to R. Kalman during the transition from ACS objects to ERP objects. Method operation algorithm is described.
ISSN:2376-6565
DOI:10.1109/ElConRus51938.2021.9396524