APA (7th ed.) Citation

Vito, A. D., Osherov, I., Urbanowicz, A. M., Katz, Y., Barkan, K., Turovets, I., & Haupt, R. (2020, August). Ultra large pitch and depth structures metrology using spectral reflectometry in combination with RCWA based model and TLM Algorithm: AM: Advanced Metrology. ASMC proceedings, 1-4. https://doi.org/10.1109/ASMC49169.2020.9185276

Chicago Style (17th ed.) Citation

Vito, Annalisa Del, Ilya Osherov, Adam Michal Urbanowicz, Yinon Katz, Kobi Barkan, Igor Turovets, and Ronny Haupt. "Ultra Large Pitch and Depth Structures Metrology Using Spectral Reflectometry in Combination with RCWA Based Model and TLM Algorithm: AM: Advanced Metrology." ASMC Proceedings Aug. 2020: 1-4. https://doi.org/10.1109/ASMC49169.2020.9185276.

MLA (9th ed.) Citation

Vito, Annalisa Del, et al. "Ultra Large Pitch and Depth Structures Metrology Using Spectral Reflectometry in Combination with RCWA Based Model and TLM Algorithm: AM: Advanced Metrology." ASMC Proceedings, Aug. 2020, pp. 1-4, https://doi.org/10.1109/ASMC49169.2020.9185276.