Wafer Level Packaging for MEMS Geiger Counter

The size of conventional Geiger counters is large because the detector (GM tubes: Geiger muller tubes) is fabricated by mechanical processing. In this paper, an MEMS (micro electro mechanical systems) GM tube using a wafer level packaging is proposed. The MEMS-GM tube with glass/Si/glass stacked str...

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Bibliographic Details
Published in2012 Fifth International Conference on Emerging Trends in Engineering and Technology pp. 66 - 69
Main Authors Miyamoto, Asei, Hashimoto, Taichi, Makimura, Kenichi, Kanda, Kensuke, Fujita, Takayuki, Maenaka, Kazusuke
Format Conference Proceeding
LanguageEnglish
Japanese
Published IEEE 01.11.2012
Subjects
Anodes
Bonding
Gamma-rays
Geiger counter
Glass
MEMS
Micromechanical devices
Radiation detectors
Radioactive materials
Sensitivity
Silicon
wafer level packaging
Windows
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ISBN1479902764
9781479902767
ISSN2157-0477
DOI10.1109/ICETET.2012.20

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Summary:The size of conventional Geiger counters is large because the detector (GM tubes: Geiger muller tubes) is fabricated by mechanical processing. In this paper, an MEMS (micro electro mechanical systems) GM tube using a wafer level packaging is proposed. The MEMS-GM tube with glass/Si/glass stacked structure was fabricated by using anodic bonding and polymer bonding. With the supplied voltage of 2.6 kV to the MEMS-GM tube, pulse waves were observed when an radioactive material approached to the fabricated device.
ISBN:1479902764
9781479902767
ISSN:2157-0477
DOI:10.1109/ICETET.2012.20