Semi-empirical models of electron beam control in radiation technologies

• Published in: 2022 IEEE 2nd International Maghreb Meeting of the Conference on Sciences and Techniques of Automatic Control and Computer Engineering (MI-STA) pp. 27 - 31
• Main Authors: Lazurik, Valentina, Sawan, Salah, Lazurik, Valentin, Rudychev, Vladimir
• Format: Conference Proceeding
• Language: English
• Published: IEEE 23.05.2022
• Subjects: Atomic layer deposition; Computational modeling; Conferences; depthdose distribution; Electron beams; electron radiation; Energy exchange; Geometric modeling; Monte Carlo methods; Monte Carlo simulation; semi-empirical model
• DOI: 10.1109/MI-STA54861.2022.9837617

The work is devoted to the development of semi-empirical models for describing the depth-dose distribution in the layer depending on the angle of incidence of the electron beam. A geometric model of the region of energy transfer from an individual electron to a layer of matter with small effective values of charge and atomic number is proposed. Relationships are obtained in the form of integral transformations of the depth-dose distribution at normal incidence of the electron beam on the layer, which make it possible to calculate the depth-dose distribution for different angles of incidence of electrons. Algorithms were developed and software was implemented to determine the depth-dose distribution at various angles of incidence of the electron beam on the layer. A series of computer experiments on modeling depth dose distributions in a layer at different angles of incidence of electron beams was performed in a detailed physical model using the Monte Carlo method. Comparison of the results of calculations obtained within the framework of the proposed model with the results of modeling by the Monte Carlo method made it possible to determine the empirical parameters of the model and to estimate the range of applicability of the developed semi-empirical model. The possibilities of expanding the range of applicability of the developed semi-empirical model by modifying the geometric models of energy transfer from an individual electron to a layer of matter are discussed.