TaN thin film study for Superconducting BEOL integration

Superconducting materials integration is one of the emerging subjects for quantum applications. This paper proposes an integration scheme based on superconducting layer etching. A material selection is proposed for interconnections including metal and dielectric. Then, a focus is realised on TaN lay...

Full description

Saved in:
Bibliographic Details
Published inProceedings of the IEEE International Interconnect Technology Conference pp. 1 - 3
Main Authors Segaud, R., Chene, T., Gergaud, P., Minoret, S., Gustavo, F., Garrione, J., Royer, A., Nemouchi, F.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2023
Subjects
Dielectrics
Etching
Metallization
patterning approach
Superconducting BEOL
Superconducting epitaxial layers
Superconducting materials
Superconducting thin films
TaN
Online AccessGet full text
ISSN2380-6338
DOI10.1109/IITC/MAM57687.2023.10154766

Cover

More Information
Summary:Superconducting materials integration is one of the emerging subjects for quantum applications. This paper proposes an integration scheme based on superconducting layer etching. A material selection is proposed for interconnections including metal and dielectric. Then, a focus is realised on TaN layers as a potential technological choice. The deposition process window is explored in term of N 2 flow and thickness leading to a T c up to 2 K for 40 nm of TaN.
ISSN:2380-6338
DOI:10.1109/IITC/MAM57687.2023.10154766