Estimating Specimen Height Using SEM Working Distance

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Published inMicroscopy and microanalysis Vol. 30; no. Supplement_1
Main Authors Yoon, Jiwon, Cheon, Jisung, Hong, Won Ki, Baek, Hyeon Ji, Park, Jin Wook, Hwang, Kyu Man, Lee, Sung-Ho
Format Journal Article
LanguageEnglish
Published Oxford Oxford University Press 24.07.2024
Online AccessGet full text
ISSN1431-9276
1435-8115
DOI10.1093/mam/ozae044.199

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Author Cheon, Jisung
Hwang, Kyu Man
Yoon, Jiwon
Baek, Hyeon Ji
Park, Jin Wook
Hong, Won Ki
Lee, Sung-Ho
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Copyright The Author(s) 2024. Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved. For commercial re-use, please contact reprints@oup.com for reprints and translation rights for reprints. All other permissions can be obtained through our RightsLink service via the Permissions link on the article page on our site—for further information please contact journals.permissions@oup.com.
Copyright_xml – notice: The Author(s) 2024. Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved. For commercial re-use, please contact reprints@oup.com for reprints and translation rights for reprints. All other permissions can be obtained through our RightsLink service via the Permissions link on the article page on our site—for further information please contact journals.permissions@oup.com.
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References Kim (2024072814423014700_ozae044.199-B1) 2012
Kim (2024072814423014700_ozae044.199-B2) 2021
Nowakowski (2024072814423014700_ozae044.199-B3) 2017
References_xml – start-page: 9
  year: 2012
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  publication-title: International Electron Devices Meeting
– start-page: 313
  year: 2021
  ident: 2024072814423014700_ozae044.199-B2
  publication-title: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis
– start-page: 95
  volume-title: 28th Annual SEMI Advanced Semiconductor Manufacturing Conference
  year: 2017
  ident: 2024072814423014700_ozae044.199-B3
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Title Estimating Specimen Height Using SEM Working Distance
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