Estimating Specimen Height Using SEM Working Distance
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Published in | Microscopy and microanalysis Vol. 30; no. Supplement_1 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Oxford
Oxford University Press
24.07.2024
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Online Access | Get full text |
ISSN | 1431-9276 1435-8115 |
DOI | 10.1093/mam/ozae044.199 |
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Author | Cheon, Jisung Hwang, Kyu Man Yoon, Jiwon Baek, Hyeon Ji Park, Jin Wook Hong, Won Ki Lee, Sung-Ho |
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Copyright | The Author(s) 2024. Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved. For commercial re-use, please contact reprints@oup.com for reprints and translation rights for reprints. All other permissions can be obtained through our RightsLink service via the Permissions link on the article page on our site—for further information please contact journals.permissions@oup.com. |
Copyright_xml | – notice: The Author(s) 2024. Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved. For commercial re-use, please contact reprints@oup.com for reprints and translation rights for reprints. All other permissions can be obtained through our RightsLink service via the Permissions link on the article page on our site—for further information please contact journals.permissions@oup.com. |
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References | Kim (2024072814423014700_ozae044.199-B1) 2012 Kim (2024072814423014700_ozae044.199-B2) 2021 Nowakowski (2024072814423014700_ozae044.199-B3) 2017 |
References_xml | – start-page: 9 year: 2012 ident: 2024072814423014700_ozae044.199-B1 publication-title: International Electron Devices Meeting – start-page: 313 year: 2021 ident: 2024072814423014700_ozae044.199-B2 publication-title: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis – start-page: 95 volume-title: 28th Annual SEMI Advanced Semiconductor Manufacturing Conference year: 2017 ident: 2024072814423014700_ozae044.199-B3 |
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Title | Estimating Specimen Height Using SEM Working Distance |
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