双闭式气体静压导轨超精密工作台振动特性分析

为获得超精密工作台系统特性,针对双闭式气体静压导轨超精密工作台的振动特性展开研究.建立了工作台系统的动力学模型,推导了系统振动微分方程.通过实验得出了在实际工况中较为准确的线性弹簧刚度,用线性弹簧模拟气体静压腔,简化了系统动力学模型.最终根据系统振动微分方程建立仿真模型并进行了求解和分析,得到了仿真系统的固有频率和振型,并通过振动实验验证了仿真模型的准确度.气体静压系统的隔振效果在于高频范围,其模态特性符合超精密工作台系统的结构要求....

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Published in实验室研究与探索 Vol. 34; no. 5; pp. 42 - 44
Main Author 蔡黎明 钟君 成贤锴 刘斌 于涌
Format Journal Article
LanguageChinese
Published 中国科学院苏州生物医学工程技术研究所,江苏苏州,215163 2015
Subjects
仿真
动力学
振动
气浮工作台
闭式
闭式
气浮工作台
动力学
振动
simulation
closed
仿真
dynamic
vibration
stage with air bearings
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ISSN1006-7167

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Summary:为获得超精密工作台系统特性,针对双闭式气体静压导轨超精密工作台的振动特性展开研究.建立了工作台系统的动力学模型,推导了系统振动微分方程.通过实验得出了在实际工况中较为准确的线性弹簧刚度,用线性弹簧模拟气体静压腔,简化了系统动力学模型.最终根据系统振动微分方程建立仿真模型并进行了求解和分析,得到了仿真系统的固有频率和振型,并通过振动实验验证了仿真模型的准确度.气体静压系统的隔振效果在于高频范围,其模态特性符合超精密工作台系统的结构要求.
Bibliography:stage with air bearings ; vibration ; closed ; dynamic ; simulation
In order to study the vibration for ultra-precision stage with double closed aerostatic guide ways, a dynamic model of the system is established in this paper. Based on the results obtained on the stiffness-measured experiments, mechanical model of the air bearing system is simplified. With the system vibration differential equations achieved and solved, the natural frequency and modal shape of the model system are obtained. The correctness and accuracy of the simulation model are tested by experiments. The air bearing give better vibration isolation effect in high frequencies, the vibration characteristics of the system meet the requirements of ultra-precision stage. This paper provides the preliminary experimental data for the structure optimization and the dynamic transfer characteristic of the mode for the lithography tool in the future.
CAI Li-ming, ZHONG Jun, CHENG Xian-kai, LIU Bin, YU Yong （Suzhou Institute of Biomedical Engineering and
ISSN:1006-7167