太赫兹折叠波导慢波结构的设计与微加工

从行波管工作的物理特性提出了一种获得折叠波导慢波结构参数的简单方法,给定工作频率和电压,能够获得折叠波导慢波结构的初始参数.设计了D波段的折叠波导结构来验证该方法,对其冷测特性如色散、耦合阻抗进行了分析.仿真结果表明,设计的折叠波导慢波结构在中心频率处具有较平缓的色散关系,在中心频率处耦合阻抗为3.5欧姆.在电子注电压为20.6 kV,电流为15 mA时,27 mm（50个周期）的折叠波导慢波结构在220 GHz具有13.5 dB的增益,3 dB带宽为11 GHz （213 ～224 GHz）.同时讨论了折叠波导慢波结构的微加工工艺,并通过UV-LIGA工艺获得了实验样品....

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Bibliographic Details
Published in红外与毫米波学报 Vol. 33; no. 1; pp. 62 - 67
Main Author 王亚军 陈樟 程焰林 施志贵
Format Journal Article
LanguageChinese
Published 中国工程物理研究院,太赫兹研究中心,四川绵阳621900%中国工程物理研究院,电子工程研究所,四川绵阳621900 2014
中国工程物理研究院,电子工程研究所,四川绵阳621900
Subjects
THz辐射
仿真
折叠波导
行波管
TWT
UV-LIGA
folded waveguide
行波管
simulation
THz辐射
仿真
折叠波导
terahertz radiation
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ISSN1001-9014
DOI10.3724/SP.J.1010.2014.00062

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Summary:从行波管工作的物理特性提出了一种获得折叠波导慢波结构参数的简单方法,给定工作频率和电压,能够获得折叠波导慢波结构的初始参数.设计了D波段的折叠波导结构来验证该方法,对其冷测特性如色散、耦合阻抗进行了分析.仿真结果表明,设计的折叠波导慢波结构在中心频率处具有较平缓的色散关系,在中心频率处耦合阻抗为3.5欧姆.在电子注电压为20.6 kV,电流为15 mA时,27 mm（50个周期）的折叠波导慢波结构在220 GHz具有13.5 dB的增益,3 dB带宽为11 GHz （213 ～224 GHz）.同时讨论了折叠波导慢波结构的微加工工艺,并通过UV-LIGA工艺获得了实验样品.
Bibliography:A simple method based on the physical characteristics to get the main parameters of folded waveguide traveling wave tube （TWT） circuit is presented. Providing the operating frequency and beam voltage, the authors can obtain the ini- tial structural parameters of the FWTWT. A D-band folded waveguide circuit was used to verify this method. The cold char- acteristics including dispersion relation and interaction impedance were analyzed. The simulation results show good agree- ment with their theory formula analysis. The folded waveguide slow-wave structure has fiat dispersion relation, fairly high interaction impedance about 3.5 ohms at the center frequency of 220 GHz. The large signal performance of 27 mm （ 50 pe- riods） folded waveguide circuit was predicted. Simulations show the nonlinear gain is 13.5 dB at 220 GHz where beam volt- age and current are 20.6 kV and 15 mA, respectively. A saturated 3 dB bandwidth is 11 GHz （213 -224 GHz）. The Mi- crofabrication process to produce the folded waveguide circuits wa
ISSN:1001-9014
DOI:10.3724/SP.J.1010.2014.00062