Generation and Modulation of Controllable Multi-Focus Array Based on Phase Segmentation

• Published in: Micromachines (Basel) Vol. 13; no. 10; p. 1677
• Main Authors: Liu, Zihan, Hou, Jiaqing, Zhang, Yu, Wen, Tong, Fan, Lianbin, Zhang, Chen, Wang, Kaige, Bai, Jintao
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 01.10.2022; MDPI
• Subjects: Accuracy; Algorithms; Aperture; Arrays; Controllability; Direct laser writing; Electric fields; Fast Fourier transformations; Fourier transforms; Methods; Modulation (Electronics); modulation factor; multi-focus array; numerical simulation; Parallel processing; parallelized laser fabrication; Phase modulation; phase segmentation; Segmentation; Simulation; Values; China
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi13101677

A Circular-Sectorial Phase Segmentation (CSPS) noniterative method for effectively generating and manipulating muti-focus array (MFA) was proposed in this work. The theoretical model of the CSPS was built up based on vectorial diffraction integral and the phase modulation factor was deduced with inverse fast Fourier transform. By segmenting the entrance pupil into specified regions, which were sequentially assigned with the values carried out by phase modulation factor, the methodology could generate flexible MFAs with desired position and morphology. Subsequently, the CSPS was investigated in parallelized fabrication with a laser direct writing system. The positioning accuracy was greater than 96% and the morphologic consistency of the parallelly fabricated results was greater than 92%.