Parametric study on excitation temperature and electron temperature in low pressure plasmas

• Published in: Current applied physics Vol. 10; no. 6; pp. 1456 - 1460
• Main Authors: Park, Hoyong, Choe, Wonho
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.11.2010; 한국물리학회
• Subjects: Calibration; Diagnostic systems; Direct current; Electron density; Electron temperature; Excitation; Excitation temperature; Langmuir probe; Low pressure; Optical emission spectroscopy; Plasmas; 물리학; Langmuir probe; Optical emission spectroscopy; Excitation temperature; Electron temperature
• ISSN: 1567-1739; 1878-1675
• DOI: 10.1016/j.cap.2010.05.013

This work aims at investigation of the validity of the electron excitation temperature ( T exc) by optical emission spectroscopy (OES) as an alternative diagnostic to the electron temperature ( T e). The excitation and the electron temperatures were measured at a wide range of gas pressures and input powers in different plasmas such as capacitively-coupled, inductively-coupled, and magnetron direct current plasmas. As a result, both temperatures were found to decrease with an increase in pressure, whereas they not very dependent on power, indicating that T exc showed a tendency identical to that of T e as pressure and power were varied. This result suggests that T exc measurement can be an alternative diagnostic for T e measurement once the ratio of the two temperatures is found in advance through a calibration experiment especially for low pressure high electron density industrial processing plasmas in which probe measurements are limited.