Rugate filters prepared by rapidly alternating deposition

A methodology for the fabrication of composite （Nb205）l-x（SiO2）~ thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technol- ogy. The optical properties of the composite films varying with the co...

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Bibliographic Details
Published inChinese physics B Vol. 20; no. 9; pp. 258 - 261
Main Author 张俊超 方明 邵宇川 晋云霞 贺洪波
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.09.2011
Subjects
Deposition
Mathematical analysis
Microstructure
Optical properties
Reflection
SiO2
Spectra
Transmittance
Wavelengths
复合薄膜
扫描电子显微镜
材料组成
沉积技术
混合使用
直流磁控溅射
过滤器
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ISSN1674-1056
2058-3834
DOI10.1088/1674-1056/20/9/094212

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Summary:A methodology for the fabrication of composite （Nb205）l-x（SiO2）~ thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technol- ogy. The optical properties of the composite films varying with the composition of the material are studied in detail, Refractive indices between 1.50 and 2.14 can be realized in our coating system. Two designed rugate filters with a re- flection band at the wavelength of 532 nm are fabricated using an automatic deposition process. The microstructure of the rugate filter is investigated by using scanning electron microscopy. The calculated and the measured transmittance spectra axe in good agreement with each other, The causes of the slight differences between them are also analysed.
Bibliography:rapidly alternating deposition, rugate filter, magnetron sputtering, mixed oxides
11-5639/O4
Zhang Jun-Chao Fang Ming Shao Yu-Chuan Jin Yun-Xia and He Hong-Bo a） Key Laboratory of Material Scfence and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China b） Graduate University of Chinese Academy of Sciences, Beijing 100049, China
A methodology for the fabrication of composite （Nb205）l-x（SiO2）~ thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technol- ogy. The optical properties of the composite films varying with the composition of the material are studied in detail, Refractive indices between 1.50 and 2.14 can be realized in our coating system. Two designed rugate filters with a re- flection band at the wavelength of 532 nm are fabricated using an automatic deposition process. The microstructure of the rugate filter is investigated by using scanning electron microscopy. The calculated and the measured transmittance spectra axe in good agreement with each other, The causes of the slight differences between them are also analysed.
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ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/20/9/094212