Inverse Design for Coating Parameters in Nano-Film Growth Based on Deep Learning Neural Network and Particle Swarm Optimization Algorithm

The NN (neural network)-PSO (particle swarm optimization) method is demonstrated to be able to inversely extract the coating parameters for the multilayer nano-films through a simulation case and two experimental cases to verify its accuracy and robustness. In the simulation case, the relative error...

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Published inPhotonics Vol. 9; no. 8; p. 513
Main Authors Guo, Xiaohan, Lu, Jinsu, Li, Yu, Li, Jianhong, Huang, Weiping
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 01.08.2022
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ISSN2304-6732
2304-6732
DOI10.3390/photonics9080513

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Summary:The NN (neural network)-PSO (particle swarm optimization) method is demonstrated to be able to inversely extract the coating parameters for the multilayer nano-films through a simulation case and two experimental cases to verify its accuracy and robustness. In the simulation case, the relative error (RE) between the average layer values and the original one was less than 3.45% for 50 inverse designs. In the experimental anti-reflection (AR) coating case, the mean thickness values of the inverse design results had a RE of around 5.05%, and in the Bragg reflector case, the RE was less than 1.03% for the repeated inverse simulations. The method can also be used to solve the single-solution problem of a tandem neural network in the inverse process.
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ISSN:2304-6732
2304-6732
DOI:10.3390/photonics9080513