Acetylene–argon plasmas measured at a biased substrate electrode for diamond-like carbon deposition: I. Mass spectrometry

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Bibliographic Details
Published in	Plasma sources science & technology Vol. 20; no. 1; p. 015003
Main Authors	Baby, A, Mahony, C M O, Maguire, P D
Format	Journal Article
Language	English
Published	Bristol IOP Publishing 01.02.2011 Institute of Physics
Subjects	Discharges for spectral sources (including inductively coupled plasmas) Electric discharges Exact sciences and technology Optical (ultraviolet, visible, infrared) measurements Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma diagnostic techniques and instrumentation Absorption spectroscopy Energy distribution functions Energy distribution Diamonds Theoretical study Hydrocarbons Mass spectroscopy Carbon Quadrupoles Acetylene Gas mixtures Transients Plasma simulation Inductively coupled plasma Plasma diagnostics Ion irradiation Optical method Argon Electron density
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ISSN	0963-0252 1361-6595
DOI	10.1088/0963-0252/20/1/015003

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ISSN:	0963-0252 1361-6595
DOI:	10.1088/0963-0252/20/1/015003