A Correction of Measurement for Complex Magnetic Permeability by Direct Contact Probe

A method for obtaining magnetic permeability of thin film by the direct contact probe was developed and the measurement error of permeability was reduced. We analyzed the frequency dependence of a current path inside the magnetic thin film using by finite element method. The magnetic permeability wa...

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Bibliographic Details
Published inJournal of the Magnetics Society of Japan Vol. 46; no. 4
Main Authors Wang, Z, Ishihara, T, Okita, K, Yabukami, S
Format Journal Article
LanguageEnglish
Published Tokyo Japan Science and Technology Agency 01.07.2022
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ISSN1882-2924
1882-2932
DOI10.3379/msjmag.2207R002

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Summary:A method for obtaining magnetic permeability of thin film by the direct contact probe was developed and the measurement error of permeability was reduced. We analyzed the frequency dependence of a current path inside the magnetic thin film using by finite element method. The magnetic permeability was corrected in consideration of the frequency dependence of the high-frequency current inside the magnetic thin film. The permeability of CoNbZr film (5 mm x 5 mm, 2 μm in thickness) was optimized by the method, and measured permeability was roughly agreed with the theoretical value up to 4 GHz.
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ISSN:1882-2924
1882-2932
DOI:10.3379/msjmag.2207R002