Synthesis of organic semiconductor hexadecachloro zinc phthalocyanine and its gas sensitivity

• Published in: Journal of semiconductors Vol. 30; no. 3; pp. 78 - 82
• Main Author: 施云波 雷廷平 李赞 修德斌 赵文杰 冯侨华 王立权
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.03.2009
• Subjects: 合成; 官能团结构; 有机半导体; 气体传感器; 气敏; 真空蒸发系统; 薄膜厚度; 酞菁锌
• ISSN: 1674-4926
• DOI: 10.1088/1674-4926/30/3/034009

Due to the difficulty in synthesizing perhalogenated metallophthalocyanine, the method of ammonium molybdate solid phase catalysis was introduced, and by using tetrachlorophthalic anhydride and urea as the raw materials, hexadecachloro zinc phthalocyanine （ZnPcCl16） was synthesized. Components of the composite were analyzed by energy spectrum, and its functional group structures and absorption peaks were characterized by IR and UV-vis spectroscopy. The thin films of gas sensors were prepared in a vacuum evaporation system and evaporated onto SiO2 substrates, where sensing electrodes were made by MEMS micromachining. The optimal conditions for the films are： substrate temperature of 150 ℃ evaporation current of 95 A and film thickness of 50 nm. The result showed that the sensors were ideally sensitive to Cl2 gas and could detect the minimum concentration of 0.3 ppm.