A Method to Construct Plasma with Nonlinear Density Enhancement Effect in Multiple Internal Inductively Coupled Plasmas

A method is proposed to built up plasma based on a nonlinear enhancement phenomenon of plasma density with discharge by multiple internal antennas simultaneously. It turns out that the plasma density under multiple sources is higher than the linear summation of the density under each source. This ef...

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Bibliographic Details
Published inPlasma science & technology Vol. 13; no. 2; pp. 175 - 180
Main Author 陈志鹏 李弘 刘秋艳 罗辰 谢锦林 刘万东
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.04.2011
Subjects
内置天线
增强效应
构造
电感耦合等离子体
等离子体密度
等离子体源
线性求和
非线性现象
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ISSN1009-0630
DOI10.1088/1009-0630/13/2/10

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Summary:A method is proposed to built up plasma based on a nonlinear enhancement phenomenon of plasma density with discharge by multiple internal antennas simultaneously. It turns out that the plasma density under multiple sources is higher than the linear summation of the density under each source. This effect is helpful to reduce the fast exponential decay of plasma density in single internal inductively coupled plasma source and generating a larger-area plasma with nmltiple internal inductively coupled plasma sources. After a careful study on the balance between the enhancement and the decay of plasma density in experiments, a plasma is built up by four sources, which proves the feasibility of this method. According to the method, more sources and more intensive enhancement effect can be employed to further build up a high-density, large-area plasma for different applications.
Bibliography:inductively coupled plasmas, multiple sources, density enhancement, construct plasma
A method is proposed to built up plasma based on a nonlinear enhancement phenomenon of plasma density with discharge by multiple internal antennas simultaneously. It turns out that the plasma density under multiple sources is higher than the linear summation of the density under each source. This effect is helpful to reduce the fast exponential decay of plasma density in single internal inductively coupled plasma source and generating a larger-area plasma with nmltiple internal inductively coupled plasma sources. After a careful study on the balance between the enhancement and the decay of plasma density in experiments, a plasma is built up by four sources, which proves the feasibility of this method. According to the method, more sources and more intensive enhancement effect can be employed to further build up a high-density, large-area plasma for different applications.
CHEN Zhipeng , LI Hong, LIU Qiuyan , LUO Chen ,XIE Jinlin, LIU Wandong（ CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China）
34-1187/TL
ISSN:1009-0630
DOI:10.1088/1009-0630/13/2/10