High-shock silicon accelerometer with an over-range stopper

In this research, an accelerometer with an over-range stopper was designed, fabricated and evaluated. When a shock beyond the sensing range is applied to an acceleration sensor, an over-range stopper limits the amount of longitudinal deformation in the sensing bridge, which is weak to shocks, below...

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Bibliographic Details
Published inJournal of mechanical science and technology Vol. 30; no. 4; pp. 1817 - 1824
Main Authors Lee, Jae Min, Jang, Chang Uk, Choi, Chang Jun, Kwon, Ki Beom, Han, Jeong Sam, Kwon, Nam Yeol, Ko, Jong Soo
Format Journal Article
LanguageEnglish
Published Seoul Korean Society of Mechanical Engineers 01.04.2016
Springer Nature B.V
대한기계학회
Subjects
Acceleration
Accelerometers
Breaking
Control
Deformation
Detection
Dynamical Systems
Engineering
Industrial and Production Engineering
Mechanical Engineering
Sensors
Silicon
Vibration
기계공학
Accelerometer
Piezoresistive
Over-range stopper
High-shock
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ISSN1738-494X
1976-3824
DOI10.1007/s12206-016-0338-8

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Summary:In this research, an accelerometer with an over-range stopper was designed, fabricated and evaluated. When a shock beyond the sensing range is applied to an acceleration sensor, an over-range stopper limits the amount of longitudinal deformation in the sensing bridge, which is weak to shocks, below a certain level and so prevents the acceleration sensor from breaking. To analyze the effect of the overrange stopper shape on acceleration sensor performance, we fabricated high-shock accelerometers with over-range stoppers of three different lengths (short, medium and long models). We then performed a comparative analysis of the performance of each accelerometer.
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G704-000058.2016.30.4.008
ISSN:1738-494X
1976-3824
DOI:10.1007/s12206-016-0338-8