Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses
Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acce...
Saved in:
| Published in | Applied physics letters Vol. 109; no. 14 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Melville
American Institute of Physics
03.10.2016
|
| Subjects | |
| Online Access | Get full text |
| ISSN | 0003-6951 1077-3118 |
| DOI | 10.1063/1.4963784 |
Cover
| Abstract | Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acceptable speed is still a challenge. Here, we report a rapid formation of highly regular laser-induced periodic surface structures (HR-LIPSS) in the regime of strong ablation by infrared femtosecond laser pulses at sub-MHz repetition rate. Parameters of the laser-surface interactions and obtained experimental results suggest an important role of electrostatically assisted bond softening in initiating the HR-LIPSS formation. |
|---|---|
| AbstractList | Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acceptable speed is still a challenge. Here, we report a rapid formation of highly regular laser-induced periodic surface structures (HR-LIPSS) in the regime of strong ablation by infrared femtosecond laser pulses at sub-MHz repetition rate. Parameters of the laser-surface interactions and obtained experimental results suggest an important role of electrostatically assisted bond softening in initiating the HR-LIPSS formation. |
| Author | Bulgakova, Nadezhda M. Orazi, Leonardo Mocek, Tomáš Gruzdev, Vitaly Gnilitskyi, Iaroslav |
| Author_xml | – sequence: 1 givenname: Iaroslav surname: Gnilitskyi fullname: Gnilitskyi, Iaroslav email: iaroslav.gnilitskyi@unimore.it organization: University of Modena and Reggio Emilia (UNIMORE) – sequence: 2 givenname: Vitaly surname: Gruzdev fullname: Gruzdev, Vitaly organization: University of Missouri – sequence: 3 givenname: Nadezhda M. surname: Bulgakova fullname: Bulgakova, Nadezhda M. organization: 4 S.S. Kutateladze Institute of Thermophysics SB RAS, 1 Lavrentyev Ave., Novosibirsk 630090, Russia – sequence: 4 givenname: Tomáš surname: Mocek fullname: Mocek, Tomáš organization: Institute of Physics ASCR – sequence: 5 givenname: Leonardo surname: Orazi fullname: Orazi, Leonardo organization: University of Modena and Reggio Emilia (UNIMORE) |
| BookMark | eNp9kF1LwzAUhoNMcJte-A8CXil0S5q2ay9lqBM2vNHrkKbJmtE19SQV5683YxNB1JvzwXnOe3jPCA1a2yqELimZUJKxKZ0kRcZmeXKChpTMZhGjNB-gISGERVmR0jM0cm4T2jRmbIjeV0rWojVu67DVuDbrOgK17hsBxu9wp8DYykjsPPTS92Da9Z5zpjHSttj1oIVUuNyFsoxWiw8MqlPeeBOmILzCfeNBuNqCx41wCnDXN065c3SqRSgujnmMXu7vnueLaPn08Di_XUaSZbGPCpHmumRyRlIdk4KGkJC0JGVFqipJaEpomcu80iJLCE10FkKh0kLLguQkFmyMrg66HdjXXjnPN7aHNpzkMY1pxlies0BdHygJ1jlQmndgtgJ2nBK-fyyn_PjYwE5_sNJ4sTccjJrm142bw4b7Iv-V_xN-s_AN8q7S7BNqsZmw |
| CODEN | APPLAB |
| CitedBy_id | crossref_primary_10_1016_j_apsusc_2023_158336 crossref_primary_10_37188_lam_2021_022 crossref_primary_10_1016_j_optlastec_2020_106441 crossref_primary_10_1016_j_surfcoat_2018_03_036 crossref_primary_10_3762_bjnano_9_262 crossref_primary_10_1016_j_nano_2024_102785 crossref_primary_10_1016_j_apsusc_2017_12_155 crossref_primary_10_1038_s41377_022_00883_9 crossref_primary_10_1016_j_apsusc_2020_146307 crossref_primary_10_1038_s41598_017_08788_z crossref_primary_10_1002_admi_202400589 crossref_primary_10_1063_5_0103276 crossref_primary_10_3390_sym13061049 crossref_primary_10_1016_j_cirp_2020_06_001 crossref_primary_10_1002_adom_201900706 crossref_primary_10_1007_s11771_022_5140_4 crossref_primary_10_1103_PhysRevB_96_205429 crossref_primary_10_1002_advs_202411449 crossref_primary_10_1016_j_optlastec_2022_108594 crossref_primary_10_1063_1_4978375 crossref_primary_10_1016_j_precisioneng_2019_12_005 crossref_primary_10_1039_D0NR00269K crossref_primary_10_3390_nano13202809 crossref_primary_10_1016_j_surfin_2021_101179 crossref_primary_10_1016_j_surfcoat_2018_07_030 crossref_primary_10_1016_j_apsusc_2020_146607 crossref_primary_10_1364_AO_58_005451 crossref_primary_10_3390_met13030545 crossref_primary_10_1016_j_apsusc_2019_05_219 crossref_primary_10_29026_oes_2022_220005 crossref_primary_10_1016_j_apsusc_2021_151831 crossref_primary_10_1088_1361_6463_ad9d51 crossref_primary_10_1038_s41598_021_95665_5 crossref_primary_10_1016_j_apsusc_2019_05_171 crossref_primary_10_1016_j_apsusc_2022_154664 crossref_primary_10_1007_s13204_021_01866_9 crossref_primary_10_1016_j_apsusc_2019_02_206 crossref_primary_10_1016_j_apsusc_2022_154869 crossref_primary_10_1002_lpor_202200232 crossref_primary_10_1002_admi_202201924 crossref_primary_10_1038_s41598_017_04891_3 crossref_primary_10_3390_nano13061005 crossref_primary_10_1007_s00339_021_04664_w crossref_primary_10_3390_nano11020316 crossref_primary_10_1038_s41598_019_56638_x crossref_primary_10_1002_lpor_202200093 crossref_primary_10_1007_s10853_021_06712_5 crossref_primary_10_3788_gzxb20235207_0752303 crossref_primary_10_1016_j_optlastec_2020_106073 crossref_primary_10_1007_s12200_023_00071_6 crossref_primary_10_1016_j_apsusc_2020_146087 crossref_primary_10_1007_s12274_020_2852_3 crossref_primary_10_1016_j_apsusc_2021_150595 crossref_primary_10_3390_nano11030591 |
| Cites_doi | 10.1002/lpor.201200017 10.1016/j.pquantelec.2014.03.002 10.2351/1.4712658 10.1007/s00339-004-2803-y 10.1063/1.1703071 10.1039/C5RA14210E 10.1134/S0021364015050100 10.1364/OL.39.002491 10.1103/PhysRevB.27.1141 10.1103/PhysRevB.65.144103 10.1007/s00339-004-2856-y 10.1103/PhysRevB.86.115316 10.1070/PU1977v020n06ABEH005404 10.1364/OE.19.009035 10.1007/s00339-005-3242-0 10.1016/S0169-4332(00)00619-X 10.1016/j.apsusc.2015.10.159 10.1007/s00339-013-8093-5 10.1038/srep19571 10.1007/s00339-014-8229-2 10.1117/12.2210981 10.1364/OE.24.003238 10.1088/1612-2011/12/3/036101 10.1103/PhysRevB.67.184102 10.1364/OE.16.019354 10.1007/s00339-013-8086-4 10.1364/AO.24.003736 10.1038/nphoton.2013.272 10.1016/S0169-4332(02)00450-6 10.1016/j.eurpolymj.2015.10.012 10.1063/1.2432288 10.1063/1.3261734 10.1103/PhysRevLett.50.454 10.1088/0957-4484/27/26/265602 10.1364/OL.36.000229 10.1016/j.apsusc.2012.10.140 |
| ContentType | Journal Article |
| Copyright | Author(s) 2016 Author(s). Published by AIP Publishing. |
| Copyright_xml | – notice: Author(s) – notice: 2016 Author(s). Published by AIP Publishing. |
| DBID | AAYXX CITATION 8FD H8D L7M |
| DOI | 10.1063/1.4963784 |
| DatabaseName | CrossRef Technology Research Database Aerospace Database Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Technology Research Database Aerospace Database Advanced Technologies Database with Aerospace |
| DatabaseTitleList | CrossRef Technology Research Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| EISSN | 1077-3118 |
| ExternalDocumentID | 10_1063_1_4963784 apl |
| GrantInformation_xml | – fundername: Division of Chemical, Bioengineering, Environmental, and Transport Systems (CBET) grantid: 1336111 funderid: http://dx.doi.org/10.13039/100000146 – fundername: The state budget of the Czech Republic (project HILASE: Superlasers for the real world) grantid: LO1602 |
| GroupedDBID | -DZ -~X .DC 1UP 2-P 23M 4.4 53G 5GY 5VS 6J9 A9. AAAAW AABDS AAEUA AAGZG AAPUP AAYIH ABFTF ABJNI ABRJW ABZEH ACBEA ACBRY ACGFO ACGFS ACLYJ ACNCT ACZLF ADCTM AEGXH AEJMO AENEX AFATG AFHCQ AGKCL AGLKD AGMXG AGTJO AHSDT AIAGR AJJCW AJQPL ALEPV ALMA_UNASSIGNED_HOLDINGS AQWKA ATXIE AWQPM BPZLN CS3 D0L EBS EJD ESX F.2 F5P FDOHQ FFFMQ HAM M6X M71 M73 N9A NPSNA O-B P2P RIP RNS RQS SJN TAE TN5 UCJ UPT WH7 XJE YZZ ~02 AAGWI AAYXX ABJGX ADMLS BDMKI CITATION 8FD H8D L7M |
| ID | FETCH-LOGICAL-c362t-9a58fb3c705f2091f20405b0bd0dd441501b8c8dfa64014f60149e59fc90802a3 |
| ISSN | 0003-6951 |
| IngestDate | Sun Sep 07 03:22:47 EDT 2025 Thu Apr 24 22:53:42 EDT 2025 Tue Jul 01 01:15:40 EDT 2025 Fri Jun 21 00:14:47 EDT 2024 Sun Jul 14 10:05:39 EDT 2019 |
| IsDoiOpenAccess | false |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 14 |
| Language | English |
| License | Published by AIP Publishing. 0003-6951/2016/109(14)/143101/5/$30.00 |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c362t-9a58fb3c705f2091f20405b0bd0dd441501b8c8dfa64014f60149e59fc90802a3 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
| ORCID | 0000-0003-1449-8535 0000-0001-8718-1526 0000-0003-1245-3704 |
| OpenAccessLink | http://hdl.handle.net/11380/1132041 |
| PQID | 2121633883 |
| PQPubID | 2050678 |
| PageCount | 5 |
| ParticipantIDs | proquest_journals_2121633883 scitation_primary_10_1063_1_4963784 crossref_primary_10_1063_1_4963784 crossref_citationtrail_10_1063_1_4963784 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 20161003 2016-10-03 |
| PublicationDateYYYYMMDD | 2016-10-03 |
| PublicationDate_xml | – month: 10 year: 2016 text: 20161003 day: 03 |
| PublicationDecade | 2010 |
| PublicationPlace | Melville |
| PublicationPlace_xml | – name: Melville |
| PublicationTitle | Applied physics letters |
| PublicationYear | 2016 |
| Publisher | American Institute of Physics |
| Publisher_xml | – name: American Institute of Physics |
| References | Bonse, Koter, Hartelt, Spaltmann, Pentzien, Höhm, Rosenfeld, Krüger (c18) 2014 Bonse, Kruger, Hohm, Rosenfeld (c15) 2012 Bulgakova, Stoian, Rosenfeld, Hertel, Marine (c25) 2005 Bonse, Rosenfeld, Kruger (c6) 2009 Ionin, Kudryashov, Makarov, Rudenko, Seleznev, Sinitsyn, Kaminskaya, Popov (c4) 2015 Ursu, Mihailescu, Nistor, Teodorescu, Prokhorov, Konov, Tokarev (c12) 1985 Sipe, Young, Preston, van Driel (c24) 1983 Le Harzic, Dörr, Sauer, Neumeier, Epple, Zimmermann, Stracke (c7) 2011 Dostovalov, Korolkov, Babin (c21) 2015 Gedvilas, Mikšys, Račiukaitis (c23) 2015 Öktem, Pavlov, Ilday, Kalaycıoğlu, Rybak, Yavaş, Erdoğan, Ömer Ilday (c19) 2013 Shank, Yen, Hirlimann (c38) 1983 Birnbaum (c1) 1965 Galenko (c37) 2002 Bulgakov, Ozerov, Marine (c31) 2004 Wu, Zhigilei (c33) 2014 Garrelie, Colombier, Pigeon, Tonchev, Faure, Bounhalli, Reynaud, Parriaux (c3) 2011 Tsibidis, Barberoglou, Loukakos, Stratakis, Fotakis (c8) 2012 Vorobyev, Makin, Guo (c2) 2007 Pan, Yang, Li, Wang, Zhang, Zhao, Yao, Wu, Xu (c11) 2016 Levy, Derrien, Bulgakova, Gurevich, Mocek (c29) 2016 Vorobyev, Guo (c16) 2013 Puerto, Garcia-Lechuga, Hernandez-Rueda, Garcia-Leis, Sanchez-Cortes, Solis, Siegel (c20) 2016 Perez, Lewis (c39) 2003 Huang, Zhao, Cheng, Xu, Xu (c5) 2008 Buividas, Mikutis, Juodkazis (c17) 2014 Keldysh (c27) 1965 Costache, Kouteva-Arguirova, Reif (c32) 2004 Varlamova, Bounhallia, Reif (c9) 2013 He, Nivas, Vecchione, Hu, Amoruso (c10) 2016 Ruiz de la Cruz, Lahoz, Siegel, de la Fuente, Solis (c22) 2014 Zimmermann, Plech, Richter, Döring, Tünnermann, Nolte (c35) 2014 Anisimov, Benderskii, Farkas (c28) 1977 Reif, Costache, Henyk, Pandelov (c13) 2002 Rebollar, Castillejo, Ezquerra (c14) 2015 Henyk, Wolfframm, Reif (c30) 2000 Zhang, Lauer, Neuenschwander, Romano (c34) 2016 (2023061802190701100_c8) 2012; 86 (2023061802190701100_c1) 1965; 36 (2023061802190701100_c28) 1977; 20 (2023061802190701100_c22) 2014; 39 (2023061802190701100_c24) 1983; 27 (2023061802190701100_c12) 1985; 24 (2023061802190701100_c21) 2015; 12 (2023061802190701100_c29) 2016; 374 (2023061802190701100_c35) 2014; 114 (2023061802190701100_c16) 2013; 7 (2023061802190701100_c4) 2015; 101 (2023061802190701100_c19) 2013; 7 (2023061802190701100_c17) 2014; 38 (2023061802190701100_c32) 2004; 79 (2023061802190701100_c3) 2011; 19 (2023061802190701100_c30) 2000; 168 (2023061802190701100_c20) 2016; 27 (2023061802190701100_c37) 2002; 65 (2023061802190701100_c34) 2016; 9735 (2023061802190701100_c6) 2009; 106 (2023061802190701100_c26) 2005 (2023061802190701100_c36) 1971 (2023061802190701100_c9) 2013; 278 (2023061802190701100_c7) 2011; 36 (2023061802190701100_c15) 2012; 24 (2023061802190701100_c27) 1965; 20 (2023061802190701100_c25) 2005; 81 (2023061802190701100_c14) 2015; 73 (2023061802190701100_c38) 1983; 50 (2023061802190701100_c33) 2014; 114 (2023061802190701100_c11) 2016; 6 (2023061802190701100_c2) 2007; 101 (2023061802190701100_c18) 2014; 117 (2023061802190701100_c10) 2016; 24 (2023061802190701100_c13) 2002; 197–198 (2023061802190701100_c23) 2015; 5 (2023061802190701100_c39) 2003; 67 (2023061802190701100_c5) 2008; 16 (2023061802190701100_c31) 2004; 79 |
| References_xml | – start-page: 897 year: 2013 ident: c19 publication-title: Nat. Photonics – start-page: 103 year: 2014 ident: c18 publication-title: Appl. Phys. A – start-page: 034903 year: 2007 ident: c2 publication-title: J. Appl. Phys. – start-page: 62 year: 2013 ident: c9 publication-title: Appl. Surf. Sci. – start-page: 1429 year: 2004 ident: c32 publication-title: Appl. Phys. A – start-page: 265602 year: 2016 ident: c20 publication-title: Nanotechnology – start-page: 467 year: 1977 ident: c28 publication-title: Sov. Phys. - Usp. – start-page: 11 year: 2014 ident: c33 publication-title: Appl. Phys. A – start-page: 9035 year: 2011 ident: c3 publication-title: Opt. Express – start-page: 229 year: 2011 ident: c7 publication-title: Opt. Lett. – start-page: 1141 year: 1983 ident: c24 publication-title: Phys. Rev. B – start-page: 162 year: 2015 ident: c14 publication-title: Eur. Polym. J. – start-page: 75075 year: 2015 ident: c23 publication-title: RSC Adv. – start-page: 1307 year: 1965 ident: c27 publication-title: Sov. Phys. - JETP – start-page: 3238 year: 2016 ident: c10 publication-title: Opt. Express – start-page: 119 year: 2014 ident: c17 publication-title: Prog. Quantum Electron. – start-page: 19354 year: 2008 ident: c5 publication-title: Opt. Express – start-page: 345 year: 2005 ident: c25 publication-title: Appl. Phys. A – start-page: 115316 year: 2012 ident: c8 publication-title: Phys. Rev. B. – start-page: 385 year: 2013 ident: c16 publication-title: Laser Photonics Rev. – start-page: 3736 year: 1985 ident: c12 publication-title: Appl. Opt. – start-page: 184102 year: 2003 ident: c39 publication-title: Phys. Rev. B – start-page: 75 year: 2014 ident: c35 publication-title: Appl. Phys. A – start-page: 104910 year: 2009 ident: c6 publication-title: J. Appl. Phys. – start-page: 042006 year: 2012 ident: c15 publication-title: J. Laser Appl. – start-page: 97350 year: 2016 ident: c34 publication-title: Proc. SPIE – start-page: 19571 year: 2016 ident: c11 publication-title: Sci. Rep. – start-page: 2491 year: 2014 ident: c22 publication-title: Opt. Lett. – start-page: 3688 year: 1965 ident: c1 publication-title: J. Appl. Phys. – start-page: 144103 year: 2002 ident: c37 publication-title: Phys. Rev. B – start-page: 263 year: 2000 ident: c30 publication-title: Appl. Surf. Sci. – start-page: 350 year: 2015 ident: c4 publication-title: JETP Lett. – start-page: 1591 year: 2004 ident: c31 publication-title: Appl. Phys. A – start-page: 036101 year: 2015 ident: c21 publication-title: Laser Phys. Lett. – start-page: 157 year: 2016 ident: c29 publication-title: Appl. Surf. Sci. – start-page: 454 year: 1983 ident: c38 publication-title: Phys. Rev. Lett. – start-page: 891 year: 2002 ident: c13 publication-title: Appl. Surf. Sci. – volume: 7 start-page: 385 year: 2013 ident: 2023061802190701100_c16 publication-title: Laser Photonics Rev. doi: 10.1002/lpor.201200017 – volume: 38 start-page: 119 year: 2014 ident: 2023061802190701100_c17 publication-title: Prog. Quantum Electron. doi: 10.1016/j.pquantelec.2014.03.002 – volume: 24 start-page: 042006 year: 2012 ident: 2023061802190701100_c15 publication-title: J. Laser Appl. doi: 10.2351/1.4712658 – volume: 79 start-page: 1429 year: 2004 ident: 2023061802190701100_c32 publication-title: Appl. Phys. A doi: 10.1007/s00339-004-2803-y – volume: 36 start-page: 3688 year: 1965 ident: 2023061802190701100_c1 publication-title: J. Appl. Phys. doi: 10.1063/1.1703071 – volume-title: Properties of Group-IV, III-V and II-VI Semiconductors year: 2005 ident: 2023061802190701100_c26 – volume: 5 start-page: 75075 year: 2015 ident: 2023061802190701100_c23 publication-title: RSC Adv. doi: 10.1039/C5RA14210E – volume: 101 start-page: 350 year: 2015 ident: 2023061802190701100_c4 publication-title: JETP Lett. doi: 10.1134/S0021364015050100 – volume: 39 start-page: 2491 year: 2014 ident: 2023061802190701100_c22 publication-title: Opt. Lett. doi: 10.1364/OL.39.002491 – volume: 27 start-page: 1141 year: 1983 ident: 2023061802190701100_c24 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.27.1141 – volume: 65 start-page: 144103 year: 2002 ident: 2023061802190701100_c37 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.65.144103 – volume: 79 start-page: 1591 year: 2004 ident: 2023061802190701100_c31 publication-title: Appl. Phys. A doi: 10.1007/s00339-004-2856-y – volume: 86 start-page: 115316 year: 2012 ident: 2023061802190701100_c8 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.86.115316 – volume: 20 start-page: 467 year: 1977 ident: 2023061802190701100_c28 publication-title: Sov. Phys. - Usp. doi: 10.1070/PU1977v020n06ABEH005404 – volume: 19 start-page: 9035 year: 2011 ident: 2023061802190701100_c3 publication-title: Opt. Express doi: 10.1364/OE.19.009035 – volume: 81 start-page: 345 year: 2005 ident: 2023061802190701100_c25 publication-title: Appl. Phys. A doi: 10.1007/s00339-005-3242-0 – volume: 168 start-page: 263 year: 2000 ident: 2023061802190701100_c30 publication-title: Appl. Surf. Sci. doi: 10.1016/S0169-4332(00)00619-X – volume: 374 start-page: 157 year: 2016 ident: 2023061802190701100_c29 publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2015.10.159 – volume: 114 start-page: 75 year: 2014 ident: 2023061802190701100_c35 publication-title: Appl. Phys. A doi: 10.1007/s00339-013-8093-5 – volume: 6 start-page: 19571 year: 2016 ident: 2023061802190701100_c11 publication-title: Sci. Rep. doi: 10.1038/srep19571 – volume: 117 start-page: 103 year: 2014 ident: 2023061802190701100_c18 publication-title: Appl. Phys. A doi: 10.1007/s00339-014-8229-2 – volume: 9735 start-page: 97350 year: 2016 ident: 2023061802190701100_c34 publication-title: Proc. SPIE doi: 10.1117/12.2210981 – volume: 24 start-page: 3238 year: 2016 ident: 2023061802190701100_c10 publication-title: Opt. Express doi: 10.1364/OE.24.003238 – volume: 12 start-page: 036101 year: 2015 ident: 2023061802190701100_c21 publication-title: Laser Phys. Lett. doi: 10.1088/1612-2011/12/3/036101 – volume: 67 start-page: 184102 year: 2003 ident: 2023061802190701100_c39 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.67.184102 – volume: 16 start-page: 19354 year: 2008 ident: 2023061802190701100_c5 publication-title: Opt. Express doi: 10.1364/OE.16.019354 – volume: 114 start-page: 11 year: 2014 ident: 2023061802190701100_c33 publication-title: Appl. Phys. A doi: 10.1007/s00339-013-8086-4 – volume: 24 start-page: 3736 year: 1985 ident: 2023061802190701100_c12 publication-title: Appl. Opt. doi: 10.1364/AO.24.003736 – volume: 7 start-page: 897 year: 2013 ident: 2023061802190701100_c19 publication-title: Nat. Photonics doi: 10.1038/nphoton.2013.272 – volume: 197–198 start-page: 891 year: 2002 ident: 2023061802190701100_c13 publication-title: Appl. Surf. Sci. doi: 10.1016/S0169-4332(02)00450-6 – volume: 73 start-page: 162 year: 2015 ident: 2023061802190701100_c14 publication-title: Eur. Polym. J. doi: 10.1016/j.eurpolymj.2015.10.012 – volume-title: Thermodynamical Theory of Structure, Stability and Fluctuations year: 1971 ident: 2023061802190701100_c36 – volume: 101 start-page: 034903 year: 2007 ident: 2023061802190701100_c2 publication-title: J. Appl. Phys. doi: 10.1063/1.2432288 – volume: 106 start-page: 104910 year: 2009 ident: 2023061802190701100_c6 publication-title: J. Appl. Phys. doi: 10.1063/1.3261734 – volume: 50 start-page: 454 year: 1983 ident: 2023061802190701100_c38 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.50.454 – volume: 27 start-page: 265602 year: 2016 ident: 2023061802190701100_c20 publication-title: Nanotechnology doi: 10.1088/0957-4484/27/26/265602 – volume: 36 start-page: 229 year: 2011 ident: 2023061802190701100_c7 publication-title: Opt. Lett. doi: 10.1364/OL.36.000229 – volume: 278 start-page: 62 year: 2013 ident: 2023061802190701100_c9 publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2012.10.140 – volume: 20 start-page: 1307 year: 1965 ident: 2023061802190701100_c27 publication-title: Sov. Phys. - JETP |
| SSID | ssj0005233 |
| Score | 2.4767575 |
| Snippet | Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface... |
| SourceID | proquest crossref scitation |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| SubjectTerms | Applied physics Femtosecond pulses Infrared lasers Laser ablation Lasers Repetition Silicon |
| Title | Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses |
| URI | http://dx.doi.org/10.1063/1.4963784 https://www.proquest.com/docview/2121633883 |
| Volume | 109 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVEBS databaseName: Inspec with Full Text customDbUrl: eissn: 1077-3118 dateEnd: 20240930 omitProxy: false ssIdentifier: ssj0005233 issn: 0003-6951 databaseCode: ADMLS dateStart: 19840101 isFulltext: true titleUrlDefault: https://www.ebsco.com/products/research-databases/inspec-full-text providerName: EBSCOhost |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1bi9QwFA46i6gPoqvi6CrBCwilY9u0afu4rJdFHBHchX0rSZO4g93pMJ0ZdH695zS97TLI6ksYyiF0cr6efCc5F0Jec66DUCTC9RIVuGEeRq6UkeemsW9kIiOh6hv86Vd-fBp-PovO-uuCOrtkJSf5dmdeyf9oFZ6BXjFL9h80200KD-A36BdG0DCM19LxVGPe7qy6qOMxsPKwu6x7y2NHOqxIPCvVLHdsjVibjwhy1awA9c-dar00Aj5rIKDVWrrT4y3eIGhbvcjBEhLOulgtRXUOFN0Blq2xKjZspdWQ0bY01h6RVE5R5wd1TP3THINvsYNybY0EbMqF2PRRP-utgn-NwbbYvWSQXVH8ED_LjbA7gNLbcyWc6aTDB2y7Nsa7vKjv-v03RxGMw0MMn9fhcOySYWYuT5vas9raYi_GI9TGPLfG2kuHqAx37gJAu_BAYhKCdYltB7orRbXForhJ9oKY82BE9g7fT798HwQGMdb2WcRXautRcfaum_Iyi-ldk9vAW2wIxYClnNwn9xr3gh5arDwgN_R8n9wdFJ3cJ7e-WU09JL96_NDS0Cv4oS1-6AA_KNfghzb4ofI3bfBDe_xQxA_t8UNr_FCLn0fk9OOHk6Njt-nE4eZAcFZuKqLESJbHXmQCYJgwANGXnlSeUuiRe75M8kQZwcFfDw1Hx1tHqclTzOUW7DEZzcu5fkJobGLt6VymISwji7hUCl41MH6qPG6UGZO37cpm7Vpit5Qiq8MlOMv8rFHCmLzsRBe2NssuoYNWPVnz6VYZ8DXwQ1iSsDF51ansb5PskNqUy14iWyjz9FpzPSN3-i_ggIxAhfo5ENuVfNEg8Q_wg6kr |
| linkProvider | EBSCOhost |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Mechanisms+of+high-regularity+periodic+structuring+of+silicon+surface+by+sub-MHz+repetition+rate+ultrashort+laser+pulses&rft.jtitle=Applied+physics+letters&rft.au=Gnilitskyi%2C+Iaroslav&rft.au=Gruzdev%2C+Vitaly&rft.au=Bulgakova%2C+Nadezhda+M.&rft.au=Mocek%2C+Tom%C3%A1%C5%A1&rft.date=2016-10-03&rft.issn=0003-6951&rft.eissn=1077-3118&rft.volume=109&rft.issue=14&rft_id=info:doi/10.1063%2F1.4963784&rft.externalDocID=apl |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0003-6951&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0003-6951&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0003-6951&client=summon |