Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses

Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acce...

Full description

Saved in:
Bibliographic Details
Published inApplied physics letters Vol. 109; no. 14
Main Authors Gnilitskyi, Iaroslav, Gruzdev, Vitaly, Bulgakova, Nadezhda M., Mocek, Tomáš, Orazi, Leonardo
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 03.10.2016
Subjects
Applied physics
Femtosecond pulses
Infrared lasers
Laser ablation
Lasers
Repetition
Silicon
Online AccessGet full text
ISSN0003-6951
1077-3118
DOI10.1063/1.4963784

Cover

More Information
Summary:Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acceptable speed is still a challenge. Here, we report a rapid formation of highly regular laser-induced periodic surface structures (HR-LIPSS) in the regime of strong ablation by infrared femtosecond laser pulses at sub-MHz repetition rate. Parameters of the laser-surface interactions and obtained experimental results suggest an important role of electrostatically assisted bond softening in initiating the HR-LIPSS formation.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4963784