Design and scaling of nano-electro-mechanical non-volatile memory (NEMory) cells

Design and scaling of the NEMory cell have been discussed. Based on analytical simulation using a simple parallel-plate approximation, scaling guideline is derived in terms of pull-in, release voltage, pull-in time and release time. It has been proved that beam length is the most dominant factor whi...

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Bibliographic Details
Published inCurrent applied physics Vol. 10; no. 1; pp. 311 - 316
Main Author Choi, Woo Young
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2010
한국물리학회
Subjects
Analytical analysis
Design guideline
Finite element analysis
Nano-electro-mechanical non-volatile memory (NEMory)
Scalability
물리학
85.30.De
Nano-electro-mechanical non-volatile memory (NEMory)
Scalability
85.85.+j
Analytical analysis
Finite element analysis
Design guideline
Online AccessGet full text
ISSN1567-1739
1878-1675
DOI10.1016/j.cap.2009.06.014

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Summary:Design and scaling of the NEMory cell have been discussed. Based on analytical simulation using a simple parallel-plate approximation, scaling guideline is derived in terms of pull-in, release voltage, pull-in time and release time. It has been proved that beam length is the most dominant factor which increases operating voltage with scaling-down. Beam and air gap thickness also need to be scaled down in order to lower operating voltage while improving operating speed.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
G704-001115.2010.10.1.036
ISSN:1567-1739
1878-1675
DOI:10.1016/j.cap.2009.06.014