Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

A particle-in-cell/dynamic Monte Carlo simulation technique was developed to study the spatiotemporal electron dynamics in RF low pressure glow discharge plasmas. The electric field profile in a parallel plate one-dimensional geometry was obtained from a self-consistent fluid simulation. A strongly...

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Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 28; no. 4; pp. 727 - 737
Main Authors Lymberopoulos, D P, Economou, D J
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 14.04.1995
Institute of Physics
Subjects
Electric discharges
Exact sciences and technology
Glow; corona
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Monte Carlo method
Dynamics
Electric discharges
Fluid models
PIC model
Computerized simulation
RF systems
Glow discharges
Electrons
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ISSN0022-3727
1361-6463
DOI10.1088/0022-3727/28/4/016

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Summary:A particle-in-cell/dynamic Monte Carlo simulation technique was developed to study the spatiotemporal electron dynamics in RF low pressure glow discharge plasmas. The electric field profile in a parallel plate one-dimensional geometry was obtained from a self-consistent fluid simulation. A strongly electronegative chlorine discharge and an electropositive argon discharge were considered. Time-average results from the Monte Carlo simulation matched the fluid simulation favourably, with differences confined mainly to the volume around the plasma/sheath interface. (Original abstract-amended)
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/28/4/016