Enhancement of bcc-FeCo(100) Crystalline Orientation by Introducing Oxygen

• Published in: IEEE transactions on magnetics Vol. 47; no. 10; pp. 3917 - 3920
• Main Authors: Miyamoto, Naoaki, Kubota, Yuki, Mamiya, Keisuke, Nakagawa, Shigeki
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.10.2011; Institute of Electrical and Electronics Engineers
• Subjects: Atomic layer deposition; Cross-disciplinary physics: materials science; rheology; Crystalline orientation; Exact sciences and technology; FeCo; Iron; Magnetic tunneling; Materials science; Other topics in materials science; oxidize; perpendicular MTJ; Physics; Sputtering; Substrates; Surface treatment; Crystalline orientation; perpendicular MTJ; FeCo; Magnetic properties; oxidize
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/TMAG.2011.2148695

The introduction of oxygen at the surface of a -TbFeCo layer is effective to attain (100) orientation of bcc-FeCo layers deposited on it. The oxygen introducing time required to exhibit FeCo(100) orientation decreased as increasing oxygen flow rate. The product of oxygen flow rate and the introducing time to attain (100) orientation of FeCo was almost constant regardless of the flow rate. This may indicate that the total amount of oxygen needed to attain (100) orientation of FeCo was almost constant. Depth profiles of constituents and chemical-bonding states were observed in order to clarify the mechanism of (100) crystalline orientation of FeCo deposited on the a -TbFeCo layer with oxidized surface. It was found that oxygen atoms existed at the interface between TbFeCo and FeCo layers in the specimen that exhibited (100) orientation of FeCo. It was also confirmed that the Tb was selectively oxidized to form Tb 2 O 3 at the surface of the a -TbFeCo layer. This may indicate that the interaction between FeCo and this oxide leads to (100) orientation of FeCo.