APA (7th ed.) Citation

Oh, D. K., Jeong, H., Kim, J., Kim, Y., Kim, I., Ok, J. G., & Rho, J. (2021). Top-down nanofabrication approaches toward single-digit-nanometer scale structures. Journal of mechanical science and technology, 35(3), 837-859. https://doi.org/10.1007/s12206-021-0243-7

Chicago Style (17th ed.) Citation

Oh, Dong Kyo, Heonyeong Jeong, Joohoon Kim, Yeseul Kim, Inki Kim, Jong G. Ok, and Junsuk Rho. "Top-down Nanofabrication Approaches Toward Single-digit-nanometer Scale Structures." Journal of Mechanical Science and Technology 35, no. 3 (2021): 837-859. https://doi.org/10.1007/s12206-021-0243-7.

MLA (9th ed.) Citation

Oh, Dong Kyo, et al. "Top-down Nanofabrication Approaches Toward Single-digit-nanometer Scale Structures." Journal of Mechanical Science and Technology, vol. 35, no. 3, 2021, pp. 837-859, https://doi.org/10.1007/s12206-021-0243-7.