Micromechanics of substrate-supported thin films

The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the e...

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Published in	Acta mechanica Sinica Vol. 34; no. 2; pp. 381 - 391
Main Authors	He, Wei, Han, Meidong, Wang, Shibin, Li, Lin-An, Xue, Xiuli
Format	Journal Article
Language	English
Published	Beijing The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences 01.04.2018 Springer Nature B.V Department of Mechanics,Tianjin University, Tianjin 300072,China%Department of Engineering Mechanics,Hunan University of Science and Technology,Xiangtan 411201,China
Edition	English ed.
Subjects	Adhesion tests Bauschinger effect Classical and Continuum Physics Computational Intelligence Deformation effects Elastic deformation Elastic properties Engineering Engineering Fluid Dynamics Flexible components Mechanical properties Microelectromechanical systems Micromechanics Nanoelectromechanical systems Review Paper Substrates Theoretical and Applied Mechanics Thin films Thin films Bauschinger effect Deformation Elastic property Adhesion
Online Access	Get full text
ISSN	0567-7718 1614-3116
DOI	10.1007/s10409-017-0697-0

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Abstract	The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing. In particular, the determination of interfacial adhesion energy, film deformation, elastic properties and Bauschinger effect are discussed.
AbstractList	The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing. In particular, the determination of interfacial adhesion energy, film deformation, elastic properties and Bauschinger effect are discussed. The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics.This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing.In par-ticular,the determination of interfacial adhesion energy,film deformation, elastic properties and Bauschinger effect are discussed.
Author	Han, Meidong He, Wei Wang, Shibin Xue, Xiuli Li, Lin-An
AuthorAffiliation	Department of Mechanics,Tianjin University, Tianjin 300072,China%Department of Engineering Mechanics,Hunan University of Science and Technology,Xiangtan 411201,China
AuthorAffiliation_xml	– name: Department of Mechanics,Tianjin University, Tianjin 300072,China%Department of Engineering Mechanics,Hunan University of Science and Technology,Xiangtan 411201,China
Author_xml	– sequence: 1 givenname: Wei surname: He fullname: He, Wei organization: Department of Mechanics, Tianjin University – sequence: 2 givenname: Meidong surname: Han fullname: Han, Meidong organization: Department of Mechanics, Tianjin University – sequence: 3 givenname: Shibin surname: Wang fullname: Wang, Shibin email: shbwang@tju.edu.cn organization: Department of Mechanics, Tianjin University – sequence: 4 givenname: Lin-An surname: Li fullname: Li, Lin-An organization: Department of Mechanics, Tianjin University – sequence: 5 givenname: Xiuli surname: Xue fullname: Xue, Xiuli organization: Department of Engineering Mechanics, Hunan University of Science and Technology
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Keywords	Thin films Bauschinger effect Deformation Elastic property Adhesion
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Snippet	The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems...
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SubjectTerms	Adhesion tests Bauschinger effect Classical and Continuum Physics Computational Intelligence Deformation effects Elastic deformation Elastic properties Engineering Engineering Fluid Dynamics Flexible components Mechanical properties Microelectromechanical systems Micromechanics Nanoelectromechanical systems Review Paper Substrates Theoretical and Applied Mechanics Thin films
Title	Micromechanics of substrate-supported thin films
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