Spectroscopic Diagnostics of Atmospheric Argon Microwave Plasma Based on an Inductive Coupling Window-Rectangular Resonator

We present a novel microwave plasma source based on an inductive coupling window-rectangular resonator. A definite volume of atmospheric argon microwave plasma is excited in the source under the input of several kilowatts of microwave power operating at 2.45 0Hz. The excitation temperature and elect...

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Bibliographic Details
Published inChinese physics letters Vol. 31; no. 5; pp. 93 - 96
Main Author 王仲 张贵新 刘程 贾志东
Format Journal Article
LanguageEnglish
Published 01.05.2014
Subjects
Argon
Atmospherics
Electron density
Excitation
Inductive coupling
Microwave plasmas
Microwaves
Resonators
光谱诊断
大气
微波等离子体源
氩等离子体
电感
矩形
耦合窗口
谐振器
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ISSN0256-307X
1741-3540
DOI10.1088/0256-307X/31/5/055202

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Summary:We present a novel microwave plasma source based on an inductive coupling window-rectangular resonator. A definite volume of atmospheric argon microwave plasma is excited in the source under the input of several kilowatts of microwave power operating at 2.45 0Hz. The excitation temperature and electron temperature of the argon plasma are separately researched by using Boltzmann plot and line-to continuum intensity ratio of Ar I spectral lines. Its electron density is inferred from the Stark broadening of the Hβ line at 486.13nm.
Bibliography:WANG Zhong, ZHANG Gui-Xin, LIU Cheng, JIAZhi-Dong（ Department of Electrical Engineering, Tsinghua University, Beijing 100084）
11-1959/O4
We present a novel microwave plasma source based on an inductive coupling window-rectangular resonator. A definite volume of atmospheric argon microwave plasma is excited in the source under the input of several kilowatts of microwave power operating at 2.45 0Hz. The excitation temperature and electron temperature of the argon plasma are separately researched by using Boltzmann plot and line-to continuum intensity ratio of Ar I spectral lines. Its electron density is inferred from the Stark broadening of the Hβ line at 486.13nm.
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/31/5/055202