Through-thickness texture gradient of tantalum sputtering target
For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling p...
Saved in:
| Published in | Rare metals Vol. 36; no. 6; pp. 523 - 526 |
|---|---|
| Main Authors | , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Beijing
Nonferrous Metals Society of China
01.06.2017
Springer Nature B.V |
| Subjects | |
| Online Access | Get full text |
| ISSN | 1001-0521 1867-7185 |
| DOI | 10.1007/s12598-014-0407-z |
Cover
| Abstract | For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer. |
|---|---|
| AbstractList | For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance. In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1} fiber in the center layer compared with that in the surface layer. |
| Author | Chao Deng Shi-Feng Liu Xiao-Bo Hao Jing-Li Ji Qing Liu Hai-Yang Fan |
| AuthorAffiliation | College of Materials Science and Engineering, ChongqingUniversity, Chongqing 400044, China |
| Author_xml | – sequence: 1 givenname: Chao surname: Deng fullname: Deng, Chao organization: College of Materials Science and Engineering, Chongqing University – sequence: 2 givenname: Shi-Feng surname: Liu fullname: Liu, Shi-Feng email: dc2003121106@126.com organization: College of Materials Science and Engineering, Chongqing University – sequence: 3 givenname: Xiao-Bo surname: Hao fullname: Hao, Xiao-Bo organization: College of Materials Science and Engineering, Chongqing University – sequence: 4 givenname: Jing-Li surname: Ji fullname: Ji, Jing-Li organization: College of Materials Science and Engineering, Chongqing University – sequence: 5 givenname: Qing surname: Liu fullname: Liu, Qing organization: College of Materials Science and Engineering, Chongqing University – sequence: 6 givenname: Hai-Yang surname: Fan fullname: Fan, Hai-Yang organization: College of Materials Science and Engineering, Chongqing University |
| BookMark | eNp9kE1LAzEURYNUsK3-AHeDrqMvH5OkO6X4BQU3dR0ymcx0aptpkwxof71TWkRcdJVHuOfdxxmhgW-9Q-iawB0BkPeR0HyiMBCOgYPEuzM0JEpILInKB_0MQDDklFygUYxLAM6FgCF6mC9C29ULnBaN_fQuxiy5r9QFl9XBlI3zKWurLBmfzKpbZ3HTpeRC4-v-L9QuXaLzyqyiuzq-Y_Tx_DSfvuLZ-8vb9HGGLeMs4UlZKEqY4XlJi7wCQ6RyShLDmc2tkaZivLIGREGokIUSFRSM5tYqVXKgFRuj28PeTWi3nYtJL9su-L5SkwkIlqs-1qfkIWVDG2NwlbZNMqlpfQqmWWkCeq9LH3TpXpfe69K7niT_yE1o1iZ8n2TogYmbvREX_tx0Aro5Fi1aX2977rdJSEapEIqwH3rei0w |
| CitedBy_id | crossref_primary_10_3390_met9030358 crossref_primary_10_1016_j_pnsc_2019_08_007 crossref_primary_10_1007_s11042_019_7340_y crossref_primary_10_3390_ma12010169 crossref_primary_10_1016_j_ijrmhm_2024_106713 crossref_primary_10_1016_j_ijrmhm_2018_08_012 crossref_primary_10_1016_j_jnucmat_2023_154893 |
| Cites_doi | 10.1116/1.574531 10.1016/0956-716X(92)90140-A 10.1007/s12666-012-0148-3 10.1109/TASC.2005.849043 10.4028/www.scientific.net/MSF.408-412.1615 10.1007/s11837-001-0103-y 10.1016/S0921-5093(03)00305-8 10.1007/s11661-000-0146-7 10.1007/BF02811649 10.1007/s11664-001-0040-0 10.1007/BF02669871 10.1016/j.mee.2005.06.001 10.1007/s11664-002-0165-9 10.1023/A:1015230727381 10.1007/s11664-005-0159-5 10.1063/1.104051 10.1007/BF00188954 10.1007/s11661-005-0200-6 10.1016/j.matlet.2007.04.074 |
| ContentType | Journal Article |
| Copyright | The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg 2014 Rare Metals is a copyright of Springer, 2017. |
| Copyright_xml | – notice: The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg 2014 – notice: Rare Metals is a copyright of Springer, 2017. |
| DBID | 2RA 92L CQIGP W92 ~WA AAYXX CITATION 8BQ 8FD 8FE 8FG ABJCF AEUYN AFKRA BENPR BGLVJ CCPQU D1I DWQXO HCIFZ JG9 KB. L6V M7S PDBOC PHGZM PHGZT PKEHL PQEST PQGLB PQQKQ PQUKI PRINS PTHSS |
| DOI | 10.1007/s12598-014-0407-z |
| DatabaseName | 维普期刊资源整合服务平台 中文科技期刊数据库-CALIS站点 维普中文期刊数据库 中文科技期刊数据库-工程技术 中文科技期刊数据库- 镜像站点 CrossRef METADEX Technology Research Database ProQuest SciTech Collection ProQuest Technology Collection Materials Science & Engineering Collection ProQuest One Sustainability ProQuest Central UK/Ireland ProQuest Central Technology Collection ProQuest One Community College ProQuest Materials Science Collection ProQuest Central Korea SciTech Premium Collection (UHCL Subscription) Materials Research Database Materials Science Database ProQuest Engineering Collection Engineering Database Materials Science Collection Proquest Central Premium ProQuest One Academic (New) ProQuest One Academic Middle East (New) ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Applied & Life Sciences ProQuest One Academic ProQuest One Academic UKI Edition ProQuest Central China Engineering Collection |
| DatabaseTitle | CrossRef Materials Research Database Technology Collection Technology Research Database ProQuest One Academic Middle East (New) Materials Science Collection SciTech Premium Collection ProQuest One Community College ProQuest Central China ProQuest Central ProQuest One Applied & Life Sciences ProQuest One Sustainability ProQuest Engineering Collection ProQuest Central Korea Materials Science Database ProQuest Central (New) Engineering Collection ProQuest Materials Science Collection Engineering Database ProQuest One Academic Eastern Edition ProQuest Technology Collection ProQuest SciTech Collection METADEX ProQuest One Academic UKI Edition Materials Science & Engineering Collection ProQuest One Academic ProQuest One Academic (New) |
| DatabaseTitleList | Materials Research Database |
| Database_xml | – sequence: 1 dbid: 8FG name: ProQuest Technology Collection url: https://search.proquest.com/technologycollection1 sourceTypes: Aggregation Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| DocumentTitleAlternate | Through-thickness texture gradient of tantalum sputtering target |
| EISSN | 1867-7185 |
| EndPage | 526 |
| ExternalDocumentID | 10_1007_s12598_014_0407_z 673226681 |
| GroupedDBID | --K -EM 06D 0R~ 0VY 188 1B1 29P 2B. 2C0 2KG 2RA 2VQ 30V 4.4 406 408 40D 5VR 5VS 8FE 8FG 8RM 8TC 92H 92I 92L 92R 93N 96X AAAVM AAEDT AAFGU AAHNG AAIAL AAJKR AALRI AANZL AARHV AARTL AATNV AATVU AAUYE AAWCG AAXUO AAYFA AAYIU AAYQN AAYTO AAZMS ABDZT ABECU ABFGW ABFTD ABFTV ABJCF ABJNI ABJOX ABKAS ABKCH ABMQK ABQBU ABSXP ABTEG ABTHY ABTKH ABTMW ABXPI ACAOD ACBMV ACBRV ACBXY ACBYP ACGFS ACHSB ACIGE ACIPQ ACIWK ACKNC ACMDZ ACMLO ACOKC ACTTH ACVWB ACWMK ACZOJ ADHHG ADHIR ADINQ ADKNI ADMDM ADMUD ADOXG ADRFC ADURQ ADYFF ADZKW AEBTG AEFTE AEGNC AEJHL AEJRE AENEX AEOHA AEPYU AESKC AESTI AETCA AEVLU AEVTX AEXYK AFGCZ AFKRA AFLOW AFNRJ AFQWF AFUIB AFWTZ AFZKB AGAYW AGDGC AGGBP AGJBK AGMZJ AGQMX AGWZB AGYKE AHAVH AHBYD AHSBF AHYZX AIAKS AIIXL AILAN AIMYW AITGF AJBLW AJDOV AJRNO AJZVZ AKQUC ALFXC ALMA_UNASSIGNED_HOLDINGS AMKLP AMXSW AMYLF AMYQR ANMIH AOCGG AXYYD BA0 BENPR BGLVJ BGNMA CAG CCEZO CCPQU CDRFL CHBEP COF CQIGP CW9 D1I DDRTE DNIVK DPUIP DU5 EBLON EBS EIOEI EJD EO9 ESBYG FA0 FDB FERAY FFXSO FIGPU FINBP FNLPD FRRFC FSGXE FYJPI GGCAI GGRSB GJIRD GQ6 GQ7 HCIFZ HF~ HG6 HLICF HMJXF HRMNR HZ~ I0C IKXTQ IWAJR I~X J-C JBSCW JZLTJ KB. KOV LLZTM M41 M4Y MA- NPVJJ NQJWS NU0 O9- O9J P9N PDBOC PT4 Q2X R9I RIG RLLFE ROL RSV S1Z S27 S3B SCL SCM SDC SDG SDH SHX SNE SNPRN SNX SOHCF SOJ SPISZ SQXTU SRMVM SSLCW STPWE T13 TCJ TGT TSG U2A UG4 UGNYK UOJIU UTJUX UZ4 UZXMN VC2 VFIZW W48 W92 WK8 Z7R Z7S Z7V Z7X Z7Y Z7Z Z83 Z85 Z88 ZMTXR ~A9 ~WA -SB -S~ 5XA 5XC AACDK AAJBT AASML AAXDM AAYZH ABAKF ABWVN ACDTI ACPIV ACRPL ADMLS ADNMO AEFQL AEMSY AFBBN AGQEE AGRTI AIGIU CAJEB H13 Q-- SJYHP U1G U5L UY8 AAPKM AAYXX ABBRH ABDBE ABFSG ACSTC AEZWR AFDZB AFHIU AFOHR AHPBZ AHWEU AIGII AIXLP ATHPR AYFIA CITATION PHGZM PHGZT 8BQ 8FD ABRTQ AEUYN DWQXO JG9 L6V M7S PKEHL PQEST PQGLB PQQKQ PQUKI PRINS PTHSS PUEGO |
| ID | FETCH-LOGICAL-c343t-9db8213a45d2b5f0a178e871a43c5ca7af34fca06b1267b86f0b325cc88d402f3 |
| IEDL.DBID | U2A |
| ISSN | 1001-0521 |
| IngestDate | Thu Sep 25 00:56:03 EDT 2025 Thu Apr 24 23:12:32 EDT 2025 Tue Jul 01 01:30:02 EDT 2025 Fri Feb 21 02:43:29 EST 2025 Wed Feb 14 09:57:25 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 6 |
| Keywords | Electron backscatter diffraction Texture Tantalum sputtering target Recrystallization |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c343t-9db8213a45d2b5f0a178e871a43c5ca7af34fca06b1267b86f0b325cc88d402f3 |
| Notes | Recrystallization; Texture; Tantalumsputtering target; Electron backscatter diffraction For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer. 11-2112/TF ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
| PQID | 1906358402 |
| PQPubID | 326325 |
| PageCount | 4 |
| ParticipantIDs | proquest_journals_1906358402 crossref_citationtrail_10_1007_s12598_014_0407_z crossref_primary_10_1007_s12598_014_0407_z springer_journals_10_1007_s12598_014_0407_z chongqing_primary_673226681 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2017-06-01 |
| PublicationDateYYYYMMDD | 2017-06-01 |
| PublicationDate_xml | – month: 06 year: 2017 text: 2017-06-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationPlace | Beijing |
| PublicationPlace_xml | – name: Beijing |
| PublicationTitle | Rare metals |
| PublicationTitleAbbrev | Rare Met |
| PublicationTitleAlternate | Rare Metals |
| PublicationYear | 2017 |
| Publisher | Nonferrous Metals Society of China Springer Nature B.V |
| Publisher_xml | – name: Nonferrous Metals Society of China – name: Springer Nature B.V |
| References | Merchant, Kang, Sanganeria, Schravendijk, Mountsier (CR1) 2001; 53 Aditya, Subramanian, Krishna, Babu (CR10) 2012; 65 Michaluk, Field, Nibur, Wright, Witt (CR14) 2002; 408 Engler, Tomé, Huh (CR15) 2000; 31 Holloway, Fryer (CR3) 1990; 57 Field, Yanke, Mcgowan, Michaluk (CR11) 2005; 34 CR8 Shacham-Diamand (CR2) 2001; 30 Chen, Zhen, Shao, Dai, Cui (CR16) 2008; 62 Mathaudhu, Barber, Hartwig (CR12) 2005; 15 Latt, Park, Li (CR5) 2002; 37 Jang, Lee, Baik (CR4) 1996; 7 Wei, Jiao, Mathaudhu, Ma, Hartwig, Ramesh (CR13) 2003; 358 Michaluk (CR7) 2002; 31 Vandermeer, Snyder (CR18) 1979; 10 Clark, Garrett, Jungling, Vandermeer, Vold (CR20) 1991; 22 Raabe, Lücke (CR19) 1992; 27 Wickersham (CR9) 1987; 5 Kumar, Kumar, Paul (CR6) 2005; 82 Liu, Banovic, Biancaniello, Jiggetts (CR17) 2005; 36 SY Jang (407_CR4) 1996; 7 DP Field (407_CR11) 2005; 34 Q Wei (407_CR13) 2003; 358 M Kumar (407_CR6) 2005; 82 Y Shacham-Diamand (407_CR2) 2001; 30 JZ Chen (407_CR16) 2008; 62 SM Merchant (407_CR1) 2001; 53 J Liu (407_CR17) 2005; 36 KM Latt (407_CR5) 2002; 37 CA Michaluk (407_CR14) 2002; 408 D Raabe (407_CR19) 1992; 27 CE Wickersham (407_CR9) 1987; 5 AV Aditya (407_CR10) 2012; 65 K Holloway (407_CR3) 1990; 57 CA Michaluk (407_CR7) 2002; 31 RA Vandermeer (407_CR18) 1979; 10 O Engler (407_CR15) 2000; 31 407_CR8 SN Mathaudhu (407_CR12) 2005; 15 JB Clark (407_CR20) 1991; 22 |
| References_xml | – volume: 5 start-page: 1755 issue: 4 year: 1987 ident: CR9 article-title: Crystallographic target effects in magnetron sputtering publication-title: J Vac Sci Technol A doi: 10.1116/1.574531 – volume: 27 start-page: 1533 issue: 11 year: 1992 ident: CR19 article-title: Annealing textures of bcc metals publication-title: Scr Metall Mater doi: 10.1016/0956-716X(92)90140-A – volume: 65 start-page: 435 issue: 5 year: 2012 ident: CR10 article-title: Influence of rolling path on microstructure and mechanical properties in EB refined tantalum publication-title: Trans Indian Inst Met doi: 10.1007/s12666-012-0148-3 – volume: 15 start-page: 3434 issue: 2 year: 2005 ident: CR12 article-title: Microstructural refinement of tantalum for Nb Sn superconductor diffusion barriers publication-title: IEEE Trans Appl Supercond doi: 10.1109/TASC.2005.849043 – volume: 408 start-page: 1615 year: 2002 ident: CR14 article-title: Effects of local texture and grain structure on the sputtering performance of tantalum publication-title: Mater Sci Forum doi: 10.4028/www.scientific.net/MSF.408-412.1615 – volume: 53 start-page: 43 issue: 6 year: 2001 ident: CR1 article-title: Copper interconnects for semiconductor devices publication-title: JOM doi: 10.1007/s11837-001-0103-y – volume: 358 start-page: 266 issue: 1 year: 2003 ident: CR13 article-title: Microstructure and mechanical properties of tantalum after equal channel angular extrusion (ECAE) publication-title: Mater Sci Eng A doi: 10.1016/S0921-5093(03)00305-8 – volume: 31 start-page: 2299 issue: 9 year: 2000 ident: CR15 article-title: A study of through-thickness texture gradients in rolled sheets publication-title: Metall Mater Trans A doi: 10.1007/s11661-000-0146-7 – volume: 10 start-page: 1031 issue: 8 year: 1979 ident: CR18 article-title: Recovery and recrystallization in rolled tantalum single crystals publication-title: Metall Trans A doi: 10.1007/BF02811649 – volume: 30 start-page: 336 issue: 4 year: 2001 ident: CR2 article-title: Barrier layers for Cu ULSI metallization publication-title: J Electron Mater doi: 10.1007/s11664-001-0040-0 – volume: 22 start-page: 2039 issue: 9 year: 1991 ident: CR20 article-title: Effect of processing variables on texture and texture gradients in tantalum publication-title: Metall Trans A doi: 10.1007/BF02669871 – volume: 82 start-page: 53 issue: 1 year: 2005 ident: CR6 article-title: Thermal stability of tantalum nitride diffusion barriers for Cu metallization formed using plasma immersion ion implantation publication-title: Microelectron Eng doi: 10.1016/j.mee.2005.06.001 – volume: 31 start-page: 2 issue: 1 year: 2002 ident: CR7 article-title: Correlating discrete orientation and grain size to the sputter deposition properties of tantalum publication-title: J Electron Mater doi: 10.1007/s11664-002-0165-9 – volume: 37 start-page: 1941 issue: 10 year: 2002 ident: CR5 article-title: Behavior of ionized metal plasma deposited Ta diffusion barrier between Cu and SiO publication-title: J Mater Sci doi: 10.1023/A:1015230727381 – ident: CR8 – volume: 34 start-page: 1521 issue: 12 year: 2005 ident: CR11 article-title: Microstructural development in asymmetric processing of tantalum plate publication-title: J Electron Mater doi: 10.1007/s11664-005-0159-5 – volume: 57 start-page: 1736 issue: 17 year: 1990 ident: CR3 article-title: Tantalum as a diffusion barrier between copper and silicon publication-title: Appl Phys Lett doi: 10.1063/1.104051 – volume: 7 start-page: 271 issue: 4 year: 1996 ident: CR4 article-title: Tantalum and niobium as a diffusion barrier between copper and silicon publication-title: J Electron Mater doi: 10.1007/BF00188954 – volume: 36 start-page: 869 issue: 3 year: 2005 ident: CR17 article-title: Through-thickness texture gradient in an annealed Al-Mg Alloy sheet publication-title: Metall Mater Trans A doi: 10.1007/s11661-005-0200-6 – volume: 62 start-page: 88 issue: 1 year: 2008 ident: CR16 article-title: Through-thickness texture gradient in AA 7055 aluminum alloy publication-title: Mater Lett doi: 10.1016/j.matlet.2007.04.074 – volume: 57 start-page: 1736 issue: 17 year: 1990 ident: 407_CR3 publication-title: Appl Phys Lett doi: 10.1063/1.104051 – volume: 7 start-page: 271 issue: 4 year: 1996 ident: 407_CR4 publication-title: J Electron Mater – volume: 408 start-page: 1615 year: 2002 ident: 407_CR14 publication-title: Mater Sci Forum doi: 10.4028/www.scientific.net/MSF.408-412.1615 – volume: 65 start-page: 435 issue: 5 year: 2012 ident: 407_CR10 publication-title: Trans Indian Inst Met doi: 10.1007/s12666-012-0148-3 – volume: 27 start-page: 1533 issue: 11 year: 1992 ident: 407_CR19 publication-title: Scr Metall Mater doi: 10.1016/0956-716X(92)90140-A – volume: 22 start-page: 2039 issue: 9 year: 1991 ident: 407_CR20 publication-title: Metall Trans A doi: 10.1007/BF02669871 – volume: 31 start-page: 2 issue: 1 year: 2002 ident: 407_CR7 publication-title: J Electron Mater doi: 10.1007/s11664-002-0165-9 – volume: 5 start-page: 1755 issue: 4 year: 1987 ident: 407_CR9 publication-title: J Vac Sci Technol A doi: 10.1116/1.574531 – volume: 358 start-page: 266 issue: 1 year: 2003 ident: 407_CR13 publication-title: Mater Sci Eng A doi: 10.1016/S0921-5093(03)00305-8 – volume: 36 start-page: 869 issue: 3 year: 2005 ident: 407_CR17 publication-title: Metall Mater Trans A doi: 10.1007/s11661-005-0200-6 – volume: 82 start-page: 53 issue: 1 year: 2005 ident: 407_CR6 publication-title: Microelectron Eng doi: 10.1016/j.mee.2005.06.001 – volume: 37 start-page: 1941 issue: 10 year: 2002 ident: 407_CR5 publication-title: J Mater Sci doi: 10.1023/A:1015230727381 – volume: 31 start-page: 2299 issue: 9 year: 2000 ident: 407_CR15 publication-title: Metall Mater Trans A doi: 10.1007/s11661-000-0146-7 – volume: 62 start-page: 88 issue: 1 year: 2008 ident: 407_CR16 publication-title: Mater Lett doi: 10.1016/j.matlet.2007.04.074 – volume: 10 start-page: 1031 issue: 8 year: 1979 ident: 407_CR18 publication-title: Metall Trans A doi: 10.1007/BF02811649 – ident: 407_CR8 – volume: 15 start-page: 3434 issue: 2 year: 2005 ident: 407_CR12 publication-title: IEEE Trans Appl Supercond doi: 10.1109/TASC.2005.849043 – volume: 53 start-page: 43 issue: 6 year: 2001 ident: 407_CR1 publication-title: JOM doi: 10.1007/s11837-001-0103-y – volume: 30 start-page: 336 issue: 4 year: 2001 ident: 407_CR2 publication-title: J Electron Mater doi: 10.1007/s11664-001-0040-0 – volume: 34 start-page: 1521 issue: 12 year: 2005 ident: 407_CR11 publication-title: J Electron Mater doi: 10.1007/s11664-005-0159-5 |
| SSID | ssj0044660 |
| Score | 2.1039205 |
| Snippet | For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of... For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance. In this paper, through-thickness texture gradient... |
| SourceID | proquest crossref springer chongqing |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 523 |
| SubjectTerms | Annealing Biomaterials Chemistry and Materials Science Energy Materials Engineering Materials Science Metallic Materials Nanoscale Science and Technology Physical Chemistry Shear Sputtering Surface layers Tantalum Texture 厚度 梯度 溅射靶材 相关成分 织构 表面层 轧制过程 钽 |
| SummonAdditionalLinks | – databaseName: ProQuest Central dbid: BENPR link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8QwEB50vehBfOLqKj14UoJt07TZg_hiRQQXkV3wVvJoFJR978Vf70zbuCoo9NYmh0k630zmy3wAx8IijGkTMotowpK4yJgSmWUIZalM8SksXXB-6KZ3_eT-WTwvQdffhSFapfeJpaO2Q0Nn5GcIXIiNmI7EF6MxI9Uoqq56CQ1VSyvY87LF2DKsoEsWYQNWrjvdxyfvm6l4WfUnoCQakcvXOcvLdJgJELGLiBlhxj6o28LrcPAyRgz5iVqLUPRX9bQEpdsNWK-jyeCqWv5NWCoGW7D2rcfgNlz2KiUeRsT2N3JsAZE95pMieJmUfK9ZMHQBiQkrdFTBdFRKV-PYoGKJ70D_ttO7uWO1bAIzPOEz1rZaxhFXibCxFi5UUSYLzItUwo0wKlOOJ86oMNVRnGZapi7UPBbGSGnRvI7vQmMwHBR7ECRtzjEi4rZtRaKEbEtMYJxLI-0ibW3chIMvE-Wjqj0GMcUwpktl1ITQGy03dcdxEr54zxe9ksnmOdo8J5vnH004-Rri5_vn45Zfibz-86b5Yp804dSvzrfXf022__9kB7AaE6CX5y8taMwm8-IQw5GZPqr32CeUINrR priority: 102 providerName: ProQuest |
| Title | Through-thickness texture gradient of tantalum sputtering target |
| URI | http://lib.cqvip.com/qk/85314X/201706/673226681.html https://link.springer.com/article/10.1007/s12598-014-0407-z https://www.proquest.com/docview/1906358402 |
| Volume | 36 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3dS8MwED_c9qIP4ifOzdEHn5RA2zRt9uaUfaA4RDaYTyVpmglKN_fxsr_eSz-2KSoIhT40Scslvftd7pc7gEum0IzJyCYKrQnx3DggggWKoCnzuY9XrMwB58e-3xt69yM2ys9xzwu2exGSTDX15rAbInVDvDLECTsgqxJUmEknhYt46LYK9Wvik1kKAuMno3EqQpk_DWESKrxOkvEHvu6rYdqgzW8B0tTudA5gPweMViub4UPYiZMj2NtKI3gMN4Os2A4x3PU3o7ssw-dYzmJrPEspXQtroi1TL1igLrLm07Q6Nfa1MiL4CQw77cFdj-SVEUhEPbogTSW561DhMeVKpm3hBDxG10d4NGKRCISmno6E7UvH9QPJfW1L6rIo4lyhw6jpKZSTSRKfgeU1KUXQQ1VTMU8w3uToo2jtO1I7Uim3CrW1iMJplgHDkMEQtvncqYJdCC2M8qTiprbFe7hJh2xkHqLMQyPzcFWFq3WXYrw_GteLmQjzn2seIoZBmISeKX7cdTE7W49_G-z8X61rsOsaE57uuNShvJgt4wsEIAvZgBLvdBtQaXVfHtp4v233n54b6TL8BHVH1X4 |
| linkProvider | Springer Nature |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9NAEB6V9AAcEE81tMAe4AJaYe_Ddg4Vz1YpbSOEUqm3ZR_eIoGSNEmF6I_jtzFje5uCRG-VfLM9smbH883sfjMD8FwHhDHnMx4QTbgSdcmtLgNHKCuqAq86UIHz4agYHqlPx_p4DX6nWhiiVSaf2DjqMPW0R_4agQuxEdMR8WZ2ymlqFJ2uphEathutELabFmNdYcd-_esnpnCL7b2PuN4vhNjdGX8Y8m7KAPdSySUfBFeJXFqlg3A6ZjYvqxrTCKuk196WNkoVvc0Kl4uidFURMyeF9r6qAn5NlCj3Bqwr2kDpwfr7ndHnLwkL6LC07YdASTsiZTpXbYr3MPMgIhkRQbKSn1N3h2_TyckpYtbfKLkKff85rW1AcPcu3OmiV_auNbd7sFZP7sPtSz0NH8DbcTv5hxOR_js5UkbkkrN5zU7mDb9syaaR0fBii46RLWbNqGx8l7Ws9IdwdC0KfAS9yXRSbwBTAykxApNhELSyuhpUmDDFWOQu5i4E0YfNCxWZWduOg5hpGEMWVd6HLCnN-K7DOQ3a-GFWvZlJ5wZ1bkjn5rwPLy9eSfKueHgrrYTp_vSFWdllH16l1bl0-3_CHl8t7BncHI4PD8zB3mh_E24JCiaavZ8t6C3nZ_UTDIWW7mlnbwy-XreJ_wFUDBfH |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1NT9wwEB3RRarKgdIvsUDbHHpqZUhiO_HeiloWWlrUA0j05PojphIou-xmL_vrO7OJWYraShVSbrEdx3Y8bzLPbwDeSI9mzLqUebQmTORVyYwsPUNTVqgCr8rTAeevJ8XRmfh8Ls-7PKfTyHaPIcn2TAOpNNXN3tiHveXBN0TtRMIiEkVasvkDWBWUQqIHq_uH348P4mZM0cpWkIC8ZjRVMbD5p0ZIXuHnqL64xof_bqaW2PNOuHRhhYaP4Ufsf0s-udydNXbXze9IO97jBTdgvUOoyX67pJ7ASlU_hbVbuoXP4P1pm92HEVn-kjbLhAgks0mVXEwWHLImGYWEEhQb3PyS6XiRDhvrJi3z_DmcDQ9OPxyxLhUDc1zwhg28VXnGjZA-tzKkJitVhb6WEdxJZ0oTuAjOpIXN8qK0qgip5bl0TimPHmrgL6BXj-pqExIx4BxRFvcDL4WRaqDQKQqhyGzIrPd5H7ZvZkGPW8kNYp8hTixU1oc0zot2nYo5JdO40kv9ZRo6jUOnaej0vA9vb6rE9v5ReCdOtu6-5qlG0IS4DF1h7Ny7OHe3bv-tsa3_Kv0aHn77ONRfPp0cb8OjnODD4m_PDvSayax6ieCnsa-6Bf4L30r6Ow |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Through-thickness+texture+gradient+of+tantalum+sputtering+target&rft.jtitle=Rare+metals&rft.au=Deng%2C+Chao&rft.au=Liu%2C+Shi-Feng&rft.au=Hao%2C+Xiao-Bo&rft.au=Ji%2C+Jing-Li&rft.date=2017-06-01&rft.pub=Nonferrous+Metals+Society+of+China&rft.issn=1001-0521&rft.eissn=1867-7185&rft.volume=36&rft.issue=6&rft.spage=523&rft.epage=526&rft_id=info:doi/10.1007%2Fs12598-014-0407-z&rft.externalDocID=10_1007_s12598_014_0407_z |
| thumbnail_s | http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fimage.cqvip.com%2Fvip1000%2Fqk%2F85314X%2F85314X.jpg |