Through-thickness texture gradient of tantalum sputtering target

For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling p...

Full description

Saved in:
Bibliographic Details
Published inRare metals Vol. 36; no. 6; pp. 523 - 526
Main Authors Deng, Chao, Liu, Shi-Feng, Hao, Xiao-Bo, Ji, Jing-Li, Liu, Qing, Fan, Hai-Yang
Format Journal Article
LanguageEnglish
Published Beijing Nonferrous Metals Society of China 01.06.2017
Springer Nature B.V
Subjects
Annealing
Biomaterials
Chemistry and Materials Science
Energy
Materials Engineering
Materials Science
Metallic Materials
Nanoscale Science and Technology
Physical Chemistry
Shear
Sputtering
Surface layers
Tantalum
Texture
厚度
梯度
溅射靶材
相关成分
织构
表面层
轧制过程
钽
Electron backscatter diffraction
Texture
Tantalum sputtering target
Recrystallization
Online AccessGet full text
ISSN1001-0521
1867-7185
DOI10.1007/s12598-014-0407-z

Cover

More Information
Summary:For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.
Bibliography:Recrystallization; Texture; Tantalumsputtering target; Electron backscatter diffraction
For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.
11-2112/TF
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
ISSN:1001-0521
1867-7185
DOI:10.1007/s12598-014-0407-z