Ultrasensitive Detection of Infrared Photon Using Microcantilever： Theoretical Analysis

• Published in: Chinese physics letters Vol. 27; no. 10; pp. 220 - 223
• Main Author: 曹立新 张逢新 朱银芳 杨晋玲
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.10.2010
• Subjects: 位移变化; 光子探测系统; 激光多普勒; 硅微悬臂梁; 纳米加工技术; 超灵敏检测; 超高灵敏度; 近红外
• ISSN: 0256-307X; 1741-3540
• DOI: 10.1088/0256-307X/27/10/108501

We present a new method for detecting near-infrared, mid-infrared, and far-infrared photons with an ultrahigh sensitivity. The infrared photon detection was carried out by monitoring the displacement change of a vibrating microcantilever under light pressure using a laser Doppler vibrometer. Ultrathin silicon cantilevers with high sensitivity were produced using micro/nano-fabrication technology. The photon detection system was set up. The response of the microcantilever to the photon illumination is theoretically estimated, and a nanowatt resolution for the infrared photon detection is expected at room temperature with this method.