Development of CMOS sensors for electron microscopy

In this work, we show the design and preliminary characterization of an image sensor with 64x64 pixels and its associated hardware and software needed to use the chip. The aim of the chip is to be used as a sensor for TEM electron microscopy. First measurements were done using X-Rays to characterize...

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Bibliographic Details
Published inJournal of instrumentation Vol. 14; no. 12; p. C12002
Main Authors Mateos, H., Ferretti, A., Mele, L., Perić, I.
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.12.2019
Subjects
CMOS
Electron microscopy
Hardware
Microscopy
Software
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ISSN1748-0221
1748-0221
DOI10.1088/1748-0221/14/12/C12002

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Summary:In this work, we show the design and preliminary characterization of an image sensor with 64x64 pixels and its associated hardware and software needed to use the chip. The aim of the chip is to be used as a sensor for TEM electron microscopy. First measurements were done using X-Rays to characterize the chip and to test the whole system (ASIC, Software, and Hardware). The chip was tested with electrons inside an Electron Microscope at Thermo Fisher and it's functioning was checked. The chip was able to stand 50 Mrad of X-Ray and 3.6 Mrad of electrons total dose without decreasing considerably the performance.
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content type line 14
ISSN:1748-0221
1748-0221
DOI:10.1088/1748-0221/14/12/C12002