Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions （DUHOCAMIS） was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discha...

Full description

Saved in:
Bibliographic Details
Published inChinese physics C Vol. 38; no. 10; pp. 102 - 106
Main Author 付东坡 赵渭江 郭鹏 朱昆 王景辉 华景山 任晓堂 薛建明 赵红卫 刘克新
Format Journal Article
LanguageEnglish
Published 01.10.2014
Subjects
Density
Discharge
Hollow cathodes
Hot cathodes
Ion beams
Ion sources
Magnetic fields
Magnetic flux
北京大学
放电行为
测试平台
特性
磁通密度
空心阴极
金属离子束
阴极溅射
Online AccessGet full text
ISSN1674-1137
0254-3052
DOI10.1088/1674-1137/38/10/107006

Cover

More Information
Summary:For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions （DUHOCAMIS） was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.
Bibliography:11-5641/O4
FU Dong-Po,ZHAO Wei-Jiang, GUO Peng, ZHU Kun, WANG Jing-Hui,HUA Jing-Shan,REN Xiao-Tang,XUE Jian-Ming, GHAO Hong-Wei, LIU Ke-Xin （1. Institute of Heavy Ion Physics ＆ State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 100871, China;2. The Ohio State University, Nuclear Engineering Program, Columbus, OH 43210, USA; 3. Institute of Modern Physics, Chinese Academy of Science,Lanzhou 730000, China）
For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions （DUHOCAMIS） was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.
ion source, metal ion beams, Penning discharge, hollow cathode discharge, hollow cathode sputtering,magnetic bottle-shaped field
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1674-1137
0254-3052
DOI:10.1088/1674-1137/38/10/107006