Phase shift of polarized light through sculptured thin films：Experimental measurements and theoretical study

A slanted columnar TiO2 sculptured anisotropic thin film （ATF） is prepared via the glancing angle deposition technique and used as the phase retardation plate. The tilted nanocolumn microstructures of thin film induce the optical anisotropy. With the biaxial birefringent model, the optical constants...

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Published inChinese physics B Vol. 22; no. 12; pp. 466 - 471
Main Author 侯永强 齐红基 李煦 何凯 易葵 邵建达
Format Journal Article
LanguageEnglish
Published 01.12.2013
Subjects
Anisotropy
Constants
Incidence
Mathematical models
Nanostructure
Phase shift
Polarized light
Thin films
Titanium dioxide
二氧化钛
光学各向异性
实验测量
椭圆偏振光谱法
相移
薄膜
透射光谱
雕塑
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ISSN1674-1056
2058-3834
1741-4199
DOI10.1088/1674-1056/22/12/127801

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Summary:A slanted columnar TiO2 sculptured anisotropic thin film （ATF） is prepared via the glancing angle deposition technique and used as the phase retardation plate. The tilted nanocolumn microstructures of thin film induce the optical anisotropy. With the biaxial birefringent model, the optical constants dispersion equations of TiO2 ATF are derived by fitting the transmittance spectra for s-and p-polarized waves measured at normal and oblique incidence within 400 nm–1200 nm. The phase shift of polarized light after reflection and/or transmission through the TiO2 ATF is analyzed with the characteristic matrix employing the extracted structure parameters. The theoretical studies reasonably well accord with the experimental results measured with spectroscopic ellipsometry. In addition, the dependences of the phase shift on the coating physical thickness and oblique incidence angle are also discussed. Birefringence of the biaxial ATF provides a sophisticated phase modulation by varying incidence angles over a broad range to have a wide-angle phase shift.
Bibliography:Hou Yong-Qianga b, Qi Hong-Jia, Li Xua, He Kaia, Yi Kuia, Shao Jian-Daa （a Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;b Shanghai Huali Microelectronics Corporation, Shanghai 201203, China ）
birefringence thin films optical properties phase shift
A slanted columnar TiO2 sculptured anisotropic thin film （ATF） is prepared via the glancing angle deposition technique and used as the phase retardation plate. The tilted nanocolumn microstructures of thin film induce the optical anisotropy. With the biaxial birefringent model, the optical constants dispersion equations of TiO2 ATF are derived by fitting the transmittance spectra for s-and p-polarized waves measured at normal and oblique incidence within 400 nm–1200 nm. The phase shift of polarized light after reflection and/or transmission through the TiO2 ATF is analyzed with the characteristic matrix employing the extracted structure parameters. The theoretical studies reasonably well accord with the experimental results measured with spectroscopic ellipsometry. In addition, the dependences of the phase shift on the coating physical thickness and oblique incidence angle are also discussed. Birefringence of the biaxial ATF provides a sophisticated phase modulation by varying incidence angles over a broad range to have a wide-angle phase shift.
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ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/22/12/127801