Monolithic integration of a 16-channel VMUX on SOI platform

A 16-channel variable attenuator multiplexer/demultiplexer (VMUX) device is demonstrated. The VM UX is based on a rib-type structure on a silicon-on-insulator (SOI) platform. It consists of a 100-GHz arrayed waveguide grating (AWG) and an electro-optic variable optical attenuator (VOA) array with a...

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Published inJournal of semiconductors Vol. 36; no. 8; pp. 101 - 104
Main Author 袁配 吴远大 王玥 安俊明 胡雄伟
Format Journal Article
LanguageEnglish
Published 01.08.2015
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ISSN1674-4926
DOI10.1088/1674-4926/36/8/084005

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Summary:A 16-channel variable attenuator multiplexer/demultiplexer (VMUX) device is demonstrated. The VM UX is based on a rib-type structure on a silicon-on-insulator (SOI) platform. It consists of a 100-GHz arrayed waveguide grating (AWG) and an electro-optic variable optical attenuator (VOA) array with a p-i-n lateral diode structure. The insertion loss of the demonstrated device is about 9.1 dB and the corresponding crosstalk is about 10 dB. The injected current of the VOA is 60.74 mA at 20 dB attenuation and the whole area of the device is 2.9 × 1 mm2. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.
Bibliography:AWG; VOA; SOI; monolithic integration; planar lightwave circuit (PLC)
11-5781/TN
Yuan Pei, Wu Yuanda, Wang Yue, An Junming, and Hu Xiongwei( State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China)
A 16-channel variable attenuator multiplexer/demultiplexer (VMUX) device is demonstrated. The VM UX is based on a rib-type structure on a silicon-on-insulator (SOI) platform. It consists of a 100-GHz arrayed waveguide grating (AWG) and an electro-optic variable optical attenuator (VOA) array with a p-i-n lateral diode structure. The insertion loss of the demonstrated device is about 9.1 dB and the corresponding crosstalk is about 10 dB. The injected current of the VOA is 60.74 mA at 20 dB attenuation and the whole area of the device is 2.9 × 1 mm2. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.
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ISSN:1674-4926
DOI:10.1088/1674-4926/36/8/084005