Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas

The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency（RF） choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,as judged by the disappearance of self-bias on the probes.The improved technique was t...

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Published inPlasma science & technology Vol. 15; no. 6; pp. 511 - 515
Main Author 陆文琪 蒋相站 刘永新 杨烁 张权治 李小松 徐勇 朱爱民 王友年
Format Journal Article
LanguageEnglish
Published 01.06.2013
Subjects
Density
Discharge
Electron temperature
Emission
High frequencies
Plasmas
Radial distribution
Simulation
双探头
双频
无线电频率
电容耦合
离子密度
空间分辨
等离子体
诊断技术
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ISSN1009-0630
DOI10.1088/1009-0630/15/6/05

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Summary:The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency（RF） choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,as judged by the disappearance of self-bias on the probes.The improved technique was tested by spatially resolved measurements of the electron temperature and ion density in both the axial and radial directions of a dual-frequency capacitive plasma.The measured data in the axial direction were compared with simulation results,and they were excellently consistent with each other.The measured radial distributions of the ion density and electron temperature were influenced significantly by the lower frequency（LF） power.It was shown that superposition of the lower frequency to the higher frequency（HF） power shifted the maximum ion density from the radial center to the edge region,while the trend for the electron temperature profile was the opposite.The changing feature of the ion density distribution is qualitatively consistent with that of the optical emission intensity reported.
Bibliography:dual-frequency capacitive plasma;double probe;plasma diagnosis
LU Wenqi,JIANG Xiangzhan,LIU Yongxin YANG Shuo,ZHANG Quanzhi LI Xiaosong XU Yong,ZHU Aimin,WANG Younian School of Physics and Optoelectronic Technology,Dalian University of Technology, Dalian 116024,China
34-1187/TL
The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency（RF） choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,as judged by the disappearance of self-bias on the probes.The improved technique was tested by spatially resolved measurements of the electron temperature and ion density in both the axial and radial directions of a dual-frequency capacitive plasma.The measured data in the axial direction were compared with simulation results,and they were excellently consistent with each other.The measured radial distributions of the ion density and electron temperature were influenced significantly by the lower frequency（LF） power.It was shown that superposition of the lower frequency to the higher frequency（HF） power shifted the maximum ion density from the radial center to the edge region,while the trend for the electron temperature profile was the opposite.The changing feature of the ion density distribution is qualitatively consistent with that of the optical emission intensity reported.
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ISSN:1009-0630
DOI:10.1088/1009-0630/15/6/05