Role of incident kinetic energy of adatoms in thin film growth

Film growth as a function of incident kinetic energy of adatoms is studied by employing two-dimensional molecular dynamics simulations for Lennard-Jones particles. At thermal incident kinetic energies films exhibit a high void and defect content when grown on a zero temperature substrate. Films grow...

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Published inSurface science letters Vol. 184; no. 1; pp. L375 - L382
Main Author Müller, Karl-Heinz
Format Journal Article
LanguageEnglish
Published Elsevier B.V 02.06.1987
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ISSN0167-2584
DOI10.1016/0167-2584(87)90761-4

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Abstract Film growth as a function of incident kinetic energy of adatoms is studied by employing two-dimensional molecular dynamics simulations for Lennard-Jones particles. At thermal incident kinetic energies films exhibit a high void and defect content when grown on a zero temperature substrate. Films grown at adatom incident kinetic energies typical for sputter deposition show higher average density and improved epitaxy due to the larger impact mobility of condensing atoms.
AbstractList Film growth as a function of incident kinetic energy of adatoms is studied by employing two-dimensional molecular dynamics simulations for Lennard-Jones particles. At thermal incident kinetic energies films exhibit a high void and defect content when grown on a zero temperature substrate. Films grown at adatom incident kinetic energies typical for sputter deposition show higher average density and improved epitaxy due to the larger impact mobility of condensing atoms.
Author Müller, Karl-Heinz
Author_xml – sequence: 1
  givenname: Karl-Heinz
  surname: Müller
  fullname: Müller, Karl-Heinz
  organization: CSIRO Division of Applied Physics, Sydney, Australia 2070
BookMark eNqFj09LAzEQxXOoYFv9Bh72qIfVZJMmWQ8FKf6DgiB6Dml20ka3iSRB6bc3a8WDBz3MDLyZ95jfBI188IDQCcHnBBN-UUrUzUyyUynOWiw4qdkIjX_kQzRJ6QVj0uIZGaP5Y-ihCrZy3rgOfK5enYfsTAUe4no3rHSnc9imclLlTWnW9dtqHcNH3hyhA6v7BMffc4qeb66fFnf18uH2fnG1rA3FLNdcrgi1xApDcFGA6RktH2lOsATZsiJ3DWectkyWfQO0EXzFuaACy9ZqOkVsn2tiSCmCVW_RbXXcKYLVwK0GQDUAKinUF7dixXb5y2Zc1tkFn6N2_X_m-d4MBezdQVTJOPAGOhfBZNUF93fAJ8SJc1Y
CitedBy_id crossref_primary_10_1063_1_3098254
crossref_primary_10_1088_1361_6463_ab8ceb
crossref_primary_10_1088_0963_0252_9_2_310
crossref_primary_10_1088_0022_3727_27_5_024
crossref_primary_10_1116_1_3085725
Cites_doi 10.1116/1.1312732
10.1016/0021-9991(85)90065-8
10.1088/0034-4885/47/4/002
10.1103/PhysRevLett.55.604
10.1116/1.568682
10.1063/1.1664955
10.1063/1.329473
10.1016/0040-6090(77)90037-2
ContentType Journal Article
Copyright 1987
Copyright_xml – notice: 1987
DBID AAYXX
CITATION
DOI 10.1016/0167-2584(87)90761-4
DatabaseName CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Chemistry
EndPage L382
ExternalDocumentID 10_1016_0167_2584_87_90761_4
0167258487907614
GroupedDBID 0R~
123
1RT
1~5
4.4
4G.
5VS
7-5
AACTN
AALRI
AAQFI
AAQXK
AAXUO
ABJNI
ABMAC
ABWVN
ACGFS
ACNNM
ACRPL
ADMUD
ADNMO
AFTJW
AGQPQ
AHHHB
AITUG
AKRWK
ALMA_UNASSIGNED_HOLDINGS
ASPBG
AVWKF
AZFZN
BBWZM
CS3
EBS
EJD
FDB
FGOYB
FIRID
HMV
HZ~
IHE
M38
NDZJH
O9-
R2-
RNS
ROL
SPG
WUQ
XPP
AAYWO
AAYXX
CITATION
ID FETCH-LOGICAL-c304t-68b13f1f7c10c30e4a53016a6108e894c10d26463948c302e3276b66737089fa3
ISSN 0167-2584
IngestDate Tue Jul 01 00:55:00 EDT 2025
Thu Apr 24 23:08:39 EDT 2025
Mon Apr 21 03:35:11 EDT 2025
IsPeerReviewed true
IsScholarly true
Issue 1
Language English
License https://www.elsevier.com/tdm/userlicense/1.0
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c304t-68b13f1f7c10c30e4a53016a6108e894c10d26463948c302e3276b66737089fa3
ParticipantIDs crossref_primary_10_1016_0167_2584_87_90761_4
crossref_citationtrail_10_1016_0167_2584_87_90761_4
elsevier_sciencedirect_doi_10_1016_0167_2584_87_90761_4
ProviderPackageCode CITATION
AAYXX
PublicationCentury 1900
PublicationDate 1987-06-02
PublicationDateYYYYMMDD 1987-06-02
PublicationDate_xml – month: 06
  year: 1987
  text: 1987-06-02
  day: 02
PublicationDecade 1980
PublicationTitle Surface science letters
PublicationYear 1987
Publisher Elsevier B.V
Publisher_xml – name: Elsevier B.V
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SSID ssj0019051
Score 1.5648433
Snippet Film growth as a function of incident kinetic energy of adatoms is studied by employing two-dimensional molecular dynamics simulations for Lennard-Jones...
SourceID crossref
elsevier
SourceType Enrichment Source
Index Database
Publisher
StartPage L375
Title Role of incident kinetic energy of adatoms in thin film growth
URI https://dx.doi.org/10.1016/0167-2584(87)90761-4
Volume 184
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3PT9swFLa2ctguCNimwWDygcMm5JHExj8uSKwCVStwYKBxixLXZmilnbr0wl-_92InARUNxiWqHNuR3me7n5_9vUfItrSaS2FTxrU1DGNhMlOUhiXOJ2bEs5EoUI18cioHF-Lb5d5ll4WvVpdU5Rd7-6Cu5DmoQhngiirZ_0C27RQK4DfgC09AGJ5PwvgsXg1EfzkKbnd-AWfECKwuKPrqM37YVd_8CdcZ4eGvxzc7V7D3rn7e5aXf5zNfYLTZONXHtcqn5dsneJ7-td_IBofFbMwG7npy2zkN0K1QX27qtpiLapbgXJQYtSGkbOtWR7EwDMJad8xDzpP4v3nMQxahhTU5uAfazoE4124Ogx6UqPC5H_Eaq2JNreo64iVZypSUWY8sHQzPfgzbUyKMLdbEbscGjTQylbtt2SetPsdPPUw97tCJ8xWyHPcB9CCAukpeuMkaedVv0u-9IfsILp162oBLI7g0gIuvIrhQhSK4FMGlAdy35OLo8Lw_YDHZBbM8ERWTuky5T72yaQIlThR7sPbKAuitdtrAdEpGQF6BUAoN7zPHwSYlJm1ViTa-4O9IbzKduPeEQkfKlV4ZZzNRqLS0CmhY5mHilUYbuU54Y4fcxkjwmJBknDdX_tB6OVov1yqvrZeLdcLaVr9DJJRH6qvGxHkcvIGl5TAw_tly49ktP5DX3WjfJL1qNndbQBqr8mMcO38BDE1hdg
linkProvider Library Specific Holdings
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Role+of+incident+kinetic+energy+of+adatoms+in+thin+film+growth&rft.jtitle=Surface+science+letters&rft.au=M%C3%BCller%2C+Karl-Heinz&rft.date=1987-06-02&rft.pub=Elsevier+B.V&rft.issn=0167-2584&rft.volume=184&rft.issue=1&rft.spage=L375&rft.epage=L382&rft_id=info:doi/10.1016%2F0167-2584%2887%2990761-4&rft.externalDocID=0167258487907614
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0167-2584&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0167-2584&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0167-2584&client=summon