Rapid two-dimensional self-consistent simulation of inductively coupled plasma and comparison with experimental data

• Published in: Applied physics letters Vol. 68; no. 18; pp. 2499 - 2501
• Main Authors: Wise, Richard S., Lymberopoulos, Dimitris P., Economou, Demetre J.
• Format: Journal Article
• Language: English
• Published: 29.04.1996
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/1.115834

A methodology has been developed to achieve rapid two-dimensional self-consistent simulation of plasma transport and reaction in an inductively coupled source of arbitrary geometry and with arbitrary plasma and surface chemistries. In this modular finite element fluid simulation the reactor was divided into bulk plasma and sheath. The bulk plasma was assumed quasineutral and the electrons were assumed to be in Boltzmann equilibrium. Separate modules computed the power deposition into the plasma, electron temperature, charged species densities, and neutral species densities. Simulation results agreed favorably with available experimental data, taken in a chlorine plasma in a Gaseous Electronics Conference reference cell, without using any adjustable parameters. Rapid convergence makes the simulation tool especially attractive for technology computer-aided design (TCAD) applications.