A Study on Properties of RF-sputtered Al-doped ZnO Thin Films Prepared with Different Ar Gas Flow Rates

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Bibliographic Details
Published inApplied Science and Convergence Technology
Format Journal Article
LanguageEnglish
Published 01.11.2016
Online AccessGet full text
ISSN2288-6559
1225-8822
DOI10.5757/asct.2016.25.6.145

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ISSN:2288-6559
1225-8822
DOI:10.5757/asct.2016.25.6.145