Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

Optical emission spectroscopy（OES）, as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance（PMECR） ion source at Peking University（PKU）. A spectrum measurement platform has been set up with the...

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Bibliographic Details
Published inChinese physics B Vol. 26; no. 9; pp. 310 - 317
Main Author 武文斌 任海涛 彭士香 徐源 温佳美 孙江 张艾霖 张滔 张景丰 陈佳洱
Format Journal Article
LanguageEnglish
Published 01.08.2017
Subjects
ECRIS
ECR等离子体
GHz
北京大学
氢气
电子回旋共振等离子体
等离子体诊断
认识过程
Online AccessGet full text
ISSN1674-1056
2058-3834
DOI10.1088/1674-1056/26/9/095204

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Summary:Optical emission spectroscopy（OES）, as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance（PMECR） ion source at Peking University（PKU）. A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance（ECR） ion source [Patent Number： ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.
Bibliography:11-5639/O4
electron cyclotron resonance（ECR） ion source hydrogen plasma plasma diagnosis optical emission spectroscopy
Optical emission spectroscopy（OES）, as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance（PMECR） ion source at Peking University（PKU）. A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance（ECR） ion source [Patent Number： ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.
ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/26/9/095204