Influence of nitrogen and magnesium doping on the properties of ZnO films
Undoped ZnO and doped ZnO films were deposited on the MgO（111） substrates using oxygen plasma-assisted molecular beam expitaxy. The orientations of the grown ZnO thin film were investigated by in situ reflection high-energy electron diffraction and ex situ x-ray diffraction（XRD）. The film roughness...
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| Published in | Chinese physics B Vol. 25; no. 7; pp. 331 - 335 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.07.2016
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-1056 2058-3834 |
| DOI | 10.1088/1674-1056/25/7/076105 |
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| Abstract | Undoped ZnO and doped ZnO films were deposited on the MgO（111） substrates using oxygen plasma-assisted molecular beam expitaxy. The orientations of the grown ZnO thin film were investigated by in situ reflection high-energy electron diffraction and ex situ x-ray diffraction（XRD）. The film roughness was measured by atomic force microscopy, which was correlated with the grain sizes determined by XRD. Synchrotron-based x-ray absorption spectroscopy was performed to study the doping effect on the electronic properties of the ZnO films, compared with density functional theory calculations.It is found that, nitrogen doping would hinder the growth of thin film, and generate the NOdefect, while magnesium doping promotes the quality of nitrogen-doped ZnO films, inhibiting（N_2）Oproduction and increasing nitrogen content. |
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| AbstractList | Undoped ZnO and doped ZnO films were deposited on the MgO（111） substrates using oxygen plasma-assisted molecular beam expitaxy. The orientations of the grown ZnO thin film were investigated by in situ reflection high-energy electron diffraction and ex situ x-ray diffraction（XRD）. The film roughness was measured by atomic force microscopy, which was correlated with the grain sizes determined by XRD. Synchrotron-based x-ray absorption spectroscopy was performed to study the doping effect on the electronic properties of the ZnO films, compared with density functional theory calculations.It is found that, nitrogen doping would hinder the growth of thin film, and generate the NOdefect, while magnesium doping promotes the quality of nitrogen-doped ZnO films, inhibiting（N_2）Oproduction and increasing nitrogen content. |
| Author | 李东华 王惠琼 周华 李亚平 黄政 郑金成 王嘉鸥 钱海杰 奎热西 陈晓航 詹华瀚 周颖慧 康俊勇 |
| AuthorAffiliation | Fujian Provincial Key Laboratory of Semiconductors and Applications, Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics, Xiamen University, Xiamen 361005, China Xiamen University Malaysia Campus, Sepang, Selangor 439000, Malaysia State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, China Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China |
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| CitedBy_id | crossref_primary_10_1038_s41598_020_59066_4 crossref_primary_10_3390_j6020016 crossref_primary_10_1088_1674_1056_acae74 crossref_primary_10_1007_s11467_023_1325_z crossref_primary_10_1016_j_optlastec_2018_11_006 crossref_primary_10_1016_j_optmat_2019_01_073 crossref_primary_10_1007_s00339_019_3149_9 |
| Cites_doi | 10.1063/1.1306636 10.1002/(ISSN)1521-396X 10.1002/macp.1975.021760402 10.1063/1.1992666 10.1103/PhysRevB.66.073202 10.1063/1.2208414 10.1103/PhysRevLett.77.3865 10.1103/PhysRev.56.978 10.1088/0268-1242/22/2/002 10.1016/S0040-6090(97)00910-3 10.1103/PhysRevLett.85.1012 10.1007/978-3-662-02853-7 10.1246/bcsj.47.50 10.1023/A:1016637215044 10.1063/1.469049 10.1016/j.mseb.2010.12.018 10.1088/0953-8984/14/28/308 10.1063/1.118611 10.5012/bkcs.2007.28.3.413 10.1063/1.2857496 10.1063/1.1931823 10.1007/BF00808333 10.1016/0022-0248(94)00642-3 10.1063/1.2089183 10.1016/0301-0104(90)87008-Y 10.1016/j.apsusc.2010.02.001 10.1116/1.579528 10.1016/j.electacta.2011.06.004 10.1063/1.121620 10.1016/j.ceramint.2012.12.018 |
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| Notes | Undoped ZnO and doped ZnO films were deposited on the MgO（111） substrates using oxygen plasma-assisted molecular beam expitaxy. The orientations of the grown ZnO thin film were investigated by in situ reflection high-energy electron diffraction and ex situ x-ray diffraction（XRD）. The film roughness was measured by atomic force microscopy, which was correlated with the grain sizes determined by XRD. Synchrotron-based x-ray absorption spectroscopy was performed to study the doping effect on the electronic properties of the ZnO films, compared with density functional theory calculations.It is found that, nitrogen doping would hinder the growth of thin film, and generate the NOdefect, while magnesium doping promotes the quality of nitrogen-doped ZnO films, inhibiting（N_2）Oproduction and increasing nitrogen content. ZnO nitrogen magnesium x-ray absorption spectra 11-5639/O4 |
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| References | 22 23 24 25 26 27 28 29 30 31 10 32 33 Blaha P (11) 2001 12 14 15 16 18 19 Yao B (6) 2009; 42 Bozovic I (13) 2001 1 2 Moulder J F (34) 1992 3 4 7 8 9 Guo J H (17) 2002; 14 Prze’zdziecka E (5) 2007; 22 20 21 |
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| Title | Influence of nitrogen and magnesium doping on the properties of ZnO films |
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