Influence of nitrogen and magnesium doping on the properties of ZnO films

Undoped ZnO and doped ZnO films were deposited on the MgO（111） substrates using oxygen plasma-assisted molecular beam expitaxy. The orientations of the grown ZnO thin film were investigated by in situ reflection high-energy electron diffraction and ex situ x-ray diffraction（XRD）. The film roughness...

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Published inChinese physics B Vol. 25; no. 7; pp. 331 - 335
Main Author 李东华 王惠琼 周华 李亚平 黄政 郑金成 王嘉鸥 钱海杰 奎热西 陈晓航 詹华瀚 周颖慧 康俊勇
Format Journal Article
LanguageEnglish
Published 01.07.2016
Subjects
X射线吸收光谱
X射线衍射
ZnO薄膜
反射高能电子衍射
氧化锌薄膜
氮掺杂
薄膜性能
镁掺杂
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ISSN1674-1056
2058-3834
DOI10.1088/1674-1056/25/7/076105

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Summary:Undoped ZnO and doped ZnO films were deposited on the MgO（111） substrates using oxygen plasma-assisted molecular beam expitaxy. The orientations of the grown ZnO thin film were investigated by in situ reflection high-energy electron diffraction and ex situ x-ray diffraction（XRD）. The film roughness was measured by atomic force microscopy, which was correlated with the grain sizes determined by XRD. Synchrotron-based x-ray absorption spectroscopy was performed to study the doping effect on the electronic properties of the ZnO films, compared with density functional theory calculations.It is found that, nitrogen doping would hinder the growth of thin film, and generate the NOdefect, while magnesium doping promotes the quality of nitrogen-doped ZnO films, inhibiting（N_2）Oproduction and increasing nitrogen content.
Bibliography:Undoped ZnO and doped ZnO films were deposited on the MgO（111） substrates using oxygen plasma-assisted molecular beam expitaxy. The orientations of the grown ZnO thin film were investigated by in situ reflection high-energy electron diffraction and ex situ x-ray diffraction（XRD）. The film roughness was measured by atomic force microscopy, which was correlated with the grain sizes determined by XRD. Synchrotron-based x-ray absorption spectroscopy was performed to study the doping effect on the electronic properties of the ZnO films, compared with density functional theory calculations.It is found that, nitrogen doping would hinder the growth of thin film, and generate the NOdefect, while magnesium doping promotes the quality of nitrogen-doped ZnO films, inhibiting（N_2）Oproduction and increasing nitrogen content.
ZnO nitrogen magnesium x-ray absorption spectra
11-5639/O4
ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/25/7/076105