Design and experimental testing of a gas cluster ion accelerator

A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from cluster...

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Published inChinese physics C Vol. 41; no. 8; pp. 143 - 146
Main Author 曾晓梅 Vasiliy Pelenovich 刘传胜 付德君
Format Journal Article
LanguageEnglish
Published 01.08.2017
Subjects
团簇
实验设计
工作气体
气源压力
离子加速器
脉冲模式
脉冲电流
脉冲离子束
Online AccessGet full text
ISSN1674-1137
0254-3052
DOI10.1088/1674-1137/41/8/087003

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Abstract A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.
AbstractList A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.
Author 曾晓梅 Vasiliy Pelenovich 刘传胜 付德君
AuthorAffiliation Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and Hubei Nuclear Solid Physics Key Laboratory, School of Physics and Technology, Wuhan University, Wuhan 430072, China
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Cites_doi 10.1063/1.59164
10.1063/1.1395471
10.1103/PhysRevLett.76.34
10.1016/0168-583X(94)00701-2
10.1016/j.vacuum.2012.11.001
10.1016/j.vacuum.2015.05.039
10.1016/j.surfcoat.2006.02.070
10.1016/0168-583X(95)00338-X
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10.1016/j.nimb.2005.05.021
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10.1016/S0254-0584(98)00101-1
10.1016/S0168-583X(02)01296-X
10.1016/j.nima.2015.06.026
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10.1016/j.nimb.2003.11.064
10.1016/S0168-583X(02)01739-1
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Notes A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.
11-5641/O4
gas cluster ion beam, flow visualization, cluster mass separation, retarding electrode
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Snippet A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of...
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SubjectTerms 团簇
实验设计
工作气体
气源压力
离子加速器
脉冲模式
脉冲电流
脉冲离子束
Title Design and experimental testing of a gas cluster ion accelerator
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