Design and experimental testing of a gas cluster ion accelerator

A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from cluster...

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Bibliographic Details
Published inChinese physics C Vol. 41; no. 8; pp. 143 - 146
Main Author 曾晓梅 Vasiliy Pelenovich 刘传胜 付德君
Format Journal Article
LanguageEnglish
Published 01.08.2017
Subjects
团簇
实验设计
工作气体
气源压力
离子加速器
脉冲模式
脉冲电流
脉冲离子束
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ISSN1674-1137
0254-3052
DOI10.1088/1674-1137/41/8/087003

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Summary:A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.
Bibliography:A gas cluster ion beam（GCIB） system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.
11-5641/O4
gas cluster ion beam, flow visualization, cluster mass separation, retarding electrode
ISSN:1674-1137
0254-3052
DOI:10.1088/1674-1137/41/8/087003