(1997). Damping Control for Packaged Micro Mechanical Devices. IEEJ transactions on sensors and micromachines. https://doi.org/10.1541/ieejsmas.117.109
Chicago Style (17th ed.) Citation"Damping Control for Packaged Micro Mechanical Devices." IEEJ Transactions on Sensors and Micromachines 1997. https://doi.org/10.1541/ieejsmas.117.109.
MLA (9th ed.) Citation"Damping Control for Packaged Micro Mechanical Devices." IEEJ Transactions on Sensors and Micromachines, 1997, https://doi.org/10.1541/ieejsmas.117.109.
Warning: These citations may not always be 100% accurate.