Damping Control for Packaged Micro Mechanical Devices

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Bibliographic Details
Published inIEEJ transactions on sensors and micromachines
Format Journal Article
LanguageEnglish
Published 1997
Online AccessGet full text
ISSN1347-5525
1341-8939
1347-5525
DOI10.1541/ieejsmas.117.109

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ISSN:1347-5525
1341-8939
1347-5525
DOI:10.1541/ieejsmas.117.109