Low-Temperature Oxidation of Si-Sn alloy Films

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Bibliographic Details
Published inShinku
Format Journal Article
LanguageEnglish
Published 1986
Online AccessGet full text
ISSN1880-9413
0559-8516
DOI10.3131/jvsj.29.9_434

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ISSN:1880-9413
0559-8516
DOI:10.3131/jvsj.29.9_434