Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology
With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or ＂cantilever...
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| Published in | Journal of semiconductors Vol. 33; no. 10; pp. 48 - 52 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.10.2012
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-4926 |
| DOI | 10.1088/1674-4926/33/10/104005 |
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| Abstract | With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis sensitivity.Adopting ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are showed.In dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%. |
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| AbstractList | With the springing up of the MEMS industry, research on accelerometers is focused on miniaturization, integration, high reliability, and high resolution, and shares extensive application prospects in military and civil fields. Comparing with the traditional single cantilever beam structure or "cantilever-mass" structure, the proposed structure of "8-beams/mass" with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis sensitivity. Adopting ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are showed. In dynamic testing conditions, it can be concluded that the axial sensitivity of x, y, and z are S sub(x) = 48 mu V/g, S sub(y) = 54 mu V/g and S sub(z) = 217 mu V/g respectively, and the nonlinearities are 0.4%, 0.6% and 0.4%. With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis sensitivity.Adopting ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are showed.In dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%. |
| Author | 杜春晖 何常德 于佳琪 葛晓洋 张永平 张文栋 |
| AuthorAffiliation | Key Laboratory of Instrumentation Science ＆ Dynamic Measurement, Ministry of Education, North University of China,Taiyuan 030051, China Key Laboratory of Science and Technology on Electronic Test ＆ Measurement, North University of China, Taiyuan 030051,China |
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| Cites_doi | 10.1109/5.704269 10.1109/16.944183 |
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| Notes | Du Chunhui,He Changde,Yu Jiaqi,Ge Xiaoyang, Zhang Yongping, Zhang Wendong（ 1 Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China, Taiyuan 030051,China 2 Key Laboratory of Science and Technology on Electronic Test ＆ Measurement,North University of China,Taiyuan 030051, China） cross-axis sensitivity; piezoresistive; symmetric distribution; triaxial accelerometer With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis sensitivity.Adopting ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are showed.In dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%. 11-5781/TN ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
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| References | 2 Zhang Jianbi (1) 2009; 22 Najafi K (3) 2003; 3 Wu Rui (4) 2007 Dong Peitao (5) 2007; 28 Takao H (8) 2000 9 Wang Yucai (6) 2007; 28 Takao H (7) 1997 |
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| Snippet | With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and... With the springing up of the MEMS industry, research on accelerometers is focused on miniaturization, integration, high reliability, and high resolution, and... |
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| SubjectTerms | Accelerometers Cantilever beams Design engineering MEMS技术 Military Miniaturization Nonlinearity Semiconductors Structural analysis 三轴 加速度计 悬臂梁结构 测量 硅压阻式 设计 轴向灵敏度 |
| Title | Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology |
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