Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology

With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or ＂cantilever...

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Bibliographic Details
Published inJournal of semiconductors Vol. 33; no. 10; pp. 48 - 52
Main Author 杜春晖 何常德 于佳琪 葛晓洋 张永平 张文栋
Format Journal Article
LanguageEnglish
Published 01.10.2012
Subjects
Accelerometers
Cantilever beams
Design engineering
MEMS技术
Military
Miniaturization
Nonlinearity
Semiconductors
Structural analysis
三轴
加速度计
悬臂梁结构
测量
硅压阻式
设计
轴向灵敏度
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ISSN1674-4926
DOI10.1088/1674-4926/33/10/104005

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Summary:With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis sensitivity.Adopting ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are showed.In dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%.
Bibliography:Du Chunhui,He Changde,Yu Jiaqi,Ge Xiaoyang, Zhang Yongping, Zhang Wendong（ 1 Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China, Taiyuan 030051,China 2 Key Laboratory of Science and Technology on Electronic Test ＆ Measurement,North University of China,Taiyuan 030051, China）
cross-axis sensitivity; piezoresistive; symmetric distribution; triaxial accelerometer
With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis sensitivity.Adopting ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are showed.In dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%.
11-5781/TN
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ISSN:1674-4926
DOI:10.1088/1674-4926/33/10/104005