Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment

During the irradiation of Ge surface with Ga＋ ions up to 1017 ions.cm 2, various patterns from ordered honeycomb to nanograss structure appear to be decided by the ion beam energy. The resulting surface morphologies have been studied by scanning electron microscopy and atomic force microscopy. For h...

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Published inChinese physics B Vol. 24; no. 5; pp. 460 - 463
Main Author 郑晓虎 张苗 黄安平 肖志松 朱剑蒙 王曦 狄增峰
Format Journal Article
LanguageEnglish
Published 01.05.2015
Subjects
b模式
Erosion
Honeycomb
Honeycomb construction
Ion bombardment
Irradiation
Morphology
Nanostructure
Protuberances
原子力显微镜
平衡状态
扫描电子显微镜
离子轰击
蜂窝状孔
锗表面
镓
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ISSN1674-1056
2058-3834
1741-4199
DOI10.1088/1674-1056/24/5/056801

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Summary:During the irradiation of Ge surface with Ga＋ ions up to 1017 ions.cm 2, various patterns from ordered honeycomb to nanograss structure appear to be decided by the ion beam energy. The resulting surface morphologies have been studied by scanning electron microscopy and atomic force microscopy. For high energy Ga＋ irradiation （16-30 keV）, by controlling the ion fluence, we have captured that the equilibrium nanograss morphology also originates from the ordered honeycomb structure. When honeycomb holes are formed by ion erosion, heterogeneous distribution of the deposited energy along the holes leads to viscous flow from the bottom to the plateau. Redistribution of target atoms results in the growth of protuberances on the plateau, and finally the pattern evolution from honeycomb to nanograss with an equilibrium condition.
Bibliography:ion beam technology, germanium, nanopattems
11-5639/O4
During the irradiation of Ge surface with Ga＋ ions up to 1017 ions.cm 2, various patterns from ordered honeycomb to nanograss structure appear to be decided by the ion beam energy. The resulting surface morphologies have been studied by scanning electron microscopy and atomic force microscopy. For high energy Ga＋ irradiation （16-30 keV）, by controlling the ion fluence, we have captured that the equilibrium nanograss morphology also originates from the ordered honeycomb structure. When honeycomb holes are formed by ion erosion, heterogeneous distribution of the deposited energy along the holes leads to viscous flow from the bottom to the plateau. Redistribution of target atoms results in the growth of protuberances on the plateau, and finally the pattern evolution from honeycomb to nanograss with an equilibrium condition.
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ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/24/5/056801