Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition

A dimensional artifact is developed, which is a chromium （Cr） deposition grating fabricated by a laser-focused atomic deposition technique. The mean pitch of the grating is measured by using a metrological atomic force microscope with a large range, where a series of reference signs have been perfor...

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Published inChinese physics letters Vol. 31; no. 7; pp. 46 - 49
Main Author 雷李华 李源 范国芳 翁浚婧 邓晓 蔡潇雨 李同保
Format Journal Article
LanguageEnglish
Published 01.07.2014
Subjects
Calibration
Chromium
Deposition
Lasers
Metrology
Nanostructure
Wavelengths
光栅制作
原子力显微镜
汇聚
沉积技术
激光波长
纳米标准
薄膜电极
铬
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ISSN0256-307X
1741-3540
DOI10.1088/0256-307X/31/7/070601

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Summary:A dimensional artifact is developed, which is a chromium （Cr） deposition grating fabricated by a laser-focused atomic deposition technique. The mean pitch of the grating is measured by using a metrological atomic force microscope with a large range, where a series of reference signs have been performed to locate the deposition area. Cosine error of the measurement result is analyzed and eliminated by the iterative angle calibration. The measurement result shows that the mean pitch of the grating is 212.66 ±0.02nm, which is very close to half of the standing laser wavelength （λ = 425.55 nm）. This means that the grating has traceability with high accuracy and can substitute the laser interference technology for instrument calibration. Moreover, using the Cr deposition grating as a nano standard can shorten the traceability chain and improve the practical application.
Bibliography:A dimensional artifact is developed, which is a chromium （Cr） deposition grating fabricated by a laser-focused atomic deposition technique. The mean pitch of the grating is measured by using a metrological atomic force microscope with a large range, where a series of reference signs have been performed to locate the deposition area. Cosine error of the measurement result is analyzed and eliminated by the iterative angle calibration. The measurement result shows that the mean pitch of the grating is 212.66 ±0.02nm, which is very close to half of the standing laser wavelength （λ = 425.55 nm）. This means that the grating has traceability with high accuracy and can substitute the laser interference technology for instrument calibration. Moreover, using the Cr deposition grating as a nano standard can shorten the traceability chain and improve the practical application.
11-1959/O4
LEI Li-Hua, LI Yuan, FAN Guo-Fang , WENG Jun-Jing, DENG Xiao, CAI Xiao-Yu, LI Tong-Bao（ 1 School of Physics Science and Engineering, Tongji University, Shanghai 200092 ;2Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203 ; 3Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190）
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/31/7/070601