Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction

A novel micro-opto-electro-mechanical system （MOEMS） accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fun- damental theories and principles of the device are introduced briefly. A flexural plate-wave dela...

Full description

Saved in:
Bibliographic Details
Published inJournal of semiconductors Vol. 33; no. 9; pp. 82 - 88
Main Author 张祖伟 温志渝 尚正国 李东玲 胡晶
Format Journal Article
LanguageEnglish
Published 01.09.2012
Subjects
Accelerometers
Design engineering
Devices
Diffraction
Oscillators
Semiconductors
Strip
Waveguides
加速度计
基础
工艺试验
微光机电
微型光机电系统
拉曼
衍射
设计
Online AccessGet full text
ISSN1674-4926
DOI10.1088/1674-4926/33/9/094009

Cover

More Information
Summary:A novel micro-opto-electro-mechanical system （MOEMS） accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fun- damental theories and principles of the device are introduced briefly. A flexural plate-wave delay-line oscillator is designed to work as an acousto-optic （AO） shifter, which has a Klein-Cook parameter of 0.38. Single-mode optical strip waveguides of 2 μm in width and thicknesses of 0.6 μm are designed by using the effective index method for light transmission. The E^y00 mode waveguide polarizers are designed to ensure the consistency of the light polarization in the waveguides. The fabrication process, based on （100） oriented, 450-#m-thick silicon wafers is proposed in detail, and some difficulties in the process are discussed carefully. At last, a series of process tests are undertaken to solve the proposed problems. The results indicate that the proposed design and fabrication process of the device is dependable and realizable.
Bibliography:A novel micro-opto-electro-mechanical system （MOEMS） accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fun- damental theories and principles of the device are introduced briefly. A flexural plate-wave delay-line oscillator is designed to work as an acousto-optic （AO） shifter, which has a Klein-Cook parameter of 0.38. Single-mode optical strip waveguides of 2 μm in width and thicknesses of 0.6 μm are designed by using the effective index method for light transmission. The E^y00 mode waveguide polarizers are designed to ensure the consistency of the light polarization in the waveguides. The fabrication process, based on （100） oriented, 450-#m-thick silicon wafers is proposed in detail, and some difficulties in the process are discussed carefully. At last, a series of process tests are undertaken to solve the proposed problems. The results indicate that the proposed design and fabrication process of the device is dependable and realizable.
accelerometer; MOEMS; Raman-Nath diffraction; design; process test
Zhang Zuwei , Wen Zhiyu, Shang Zhengguo, Li Dongling , and Hu Jing 1 Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China 2National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University Chongqing 400030, China 3Mierosystem Research Center of Chongqing University, Chongqing 400030, China
11-5781/TN
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1674-4926
DOI:10.1088/1674-4926/33/9/094009